Memory cell array structures in NAND flash memory devices
First Claim
1. A cell array structure of a NAND flash memory, comprising:
- a semiconductor substrate including an active region therein and having an inner region and an outer region;
a memory gate structure including a plurality of word lines crossing over the active region, the memory gate structure being disposed on the inner region;
a select gate structure crossing over the active region, wherein the select gate structure comprises a plurality of string selection lines and a plurality of ground selection lines respectively disposed on opposite sides of the memory gate structure, respectively; and
impurity regions disposed in the active region between the plurality of word lines, between the plurality of string selection lines, between the plurality of ground selection lines, between one of the plurality of string selection lines and an immediately adjacent one of the plurality of word lines, and between one of the plurality of ground selection lines and an immediately adjacent one of the plurality of word lines,wherein the impurity regions in the inner region have different impurity concentration distributions than the impurity regions in the outer region, and wherein one of the plurality of string selection lines and one of the plurality of ground selection lines are disposed on respective interfaces between the inner region and the outer region on the opposite sides of the memory gate structure.
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Abstract
A NAND-type non-volatile semiconductor memory device includes a gate insulating layer on an active region of a semiconductor substrate, first and second select gate structures on the active region, and a memory gate structure therebetween. The first and second select gate structures respectively include a plurality of select gate patterns, and the memory gate structure includes a plurality of storage gate patterns. The gate insulating layer includes a plurality of openings therein exposing portions of the active region between ones of the plurality of select gate patterns of the first and second select gate structures. The device may further include impurity regions in portions of the active region between the gate patterns, and halo regions adjacent ones of the impurity regions in the portions of the active region exposed by the openings in the gate insulating layer. Related fabrication methods are also discussed.
20 Citations
42 Claims
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1. A cell array structure of a NAND flash memory, comprising:
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a semiconductor substrate including an active region therein and having an inner region and an outer region; a memory gate structure including a plurality of word lines crossing over the active region, the memory gate structure being disposed on the inner region; a select gate structure crossing over the active region, wherein the select gate structure comprises a plurality of string selection lines and a plurality of ground selection lines respectively disposed on opposite sides of the memory gate structure, respectively; and impurity regions disposed in the active region between the plurality of word lines, between the plurality of string selection lines, between the plurality of ground selection lines, between one of the plurality of string selection lines and an immediately adjacent one of the plurality of word lines, and between one of the plurality of ground selection lines and an immediately adjacent one of the plurality of word lines, wherein the impurity regions in the inner region have different impurity concentration distributions than the impurity regions in the outer region, and wherein one of the plurality of string selection lines and one of the plurality of ground selection lines are disposed on respective interfaces between the inner region and the outer region on the opposite sides of the memory gate structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 40, 41, 42)
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14. A cell array structure of a NAND flash memory comprising:
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a semiconductor substrate including an active region therein and having an inner region and an outer region; a plurality of gates disposed on the inner region and the outer region of the substrate to cross over the active region; impurity regions in the active region between the plurality of gates; a gate insulating pattern disposed between the plurality of gates and the semiconductor substrate, wherein the gate insulating pattern is on surfaces of the active region between adjacent ones of the plurality of gates on the inner region and has openings exposing portions of the active region between adjacent ones of the plurality of gates on the outer region; and outer halo regions in the active region adjacent lower portions of ones of the impurity regions of the outer region. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. A NAND-type non-volatile semiconductor memory device, comprising:
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a semiconductor substrate including an active region therein; a gate insulating layer on the active region of the substrate; first and second select gate structures respectively comprising a plurality of select gate patterns on the active region of the substrate; and a memory gate structure comprising a plurality of storage gate patterns on the active region of the substrate between the first and second select gate structures, wherein the gate insulating layer is on portions of the active region between adjacent ones of the plurality of storage gate patterns of the memory gate structure and includes a plurality of openings therein exposing portions of the active region between adjacent ones of the plurality of select gate patterns of the first and second select gate structures. - View Dependent Claims (27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39)
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Specification