Flexures
First Claim
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1. A system comprising:
- at least one first electrically conductive layer having a first reflective face;
a support centrally located opposite the at least one first electrically conductive layer;
a plurality of flexures extending from the support and coupled to the at least one first electrically conductive layer;
at least one second electrically conductive layer opposite the at least one first electrically conductive layer; and
a control system configured to establish an electrical potential between the at least one first electrically conductive layer and the at least one second electrically conductive layer such that the first reflective face uniformly moves towards and away from the at least one second conductive layer.
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Abstract
Various embodiments of a MEMs structure including flexures movably supporting a reflective face are disclosed.
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Citations
11 Claims
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1. A system comprising:
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at least one first electrically conductive layer having a first reflective face; a support centrally located opposite the at least one first electrically conductive layer; a plurality of flexures extending from the support and coupled to the at least one first electrically conductive layer; at least one second electrically conductive layer opposite the at least one first electrically conductive layer; and a control system configured to establish an electrical potential between the at least one first electrically conductive layer and the at least one second electrically conductive layer such that the first reflective face uniformly moves towards and away from the at least one second conductive layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A MEMs structure comprising:
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a first reflector; a second reflector; a third reflector; a support post between the first reflector, the second reflector and the third reflector; a first flexure extending from the support post and coupled to the first reflector; a second flexure extending from the support post and coupled to the second reflector; and a third flexure extending from the support post and coupled to the third reflector; wherein the first flexure spirals from the support post towards a central portion of the first reflector. - View Dependent Claims (10)
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11. A MEMs structure comprising:
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at least one partial reflector; a first reflector opposite the at least one partial reflector; a second reflector opposite the at least one partial reflector; a third reflector opposite the at least one partial reflector; a support post between the first reflector, the second reflector and the third reflector supporting the at least one partial reflector; a flexure support proximate the support post; and a flexure extending from the flexure support to the first reflector.
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Specification