Interferometric modulation of radiation
First Claim
1. A MEMS display device comprising:
- a substrate of a display comprising an electronically inactive medium;
an array of MEMS devices forming pixels of the display; and
drive electronics comprising MEMS elements configured to drive the display,wherein the array of MEMS devices and the drive electronics are fabricated on a same surface of the substrate.
4 Assignments
0 Petitions
Accused Products
Abstract
An Interferometric Modulator (IMod) is a microelectromechanical device for modulating light using interference. The colors of these devices may be determined in a spatial fashion, and their inherent color shift may be compensated for using several optical compensation mechanisms. Brightness, addressing, and driving of IMods may be accomplished in a variety of ways with appropriate packaging, and peripheral electronics which can be attached and/or fabricated using one of many techniques. The devices may be used in both embedded and directly perceived applications, the latter providing multiple viewing modes as well as a multitude of product concepts ranging in size from microscopic to architectural in scope.
342 Citations
10 Claims
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1. A MEMS display device comprising:
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a substrate of a display comprising an electronically inactive medium; an array of MEMS devices forming pixels of the display; and drive electronics comprising MEMS elements configured to drive the display, wherein the array of MEMS devices and the drive electronics are fabricated on a same surface of the substrate. - View Dependent Claims (2, 3, 4)
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5. A display device comprising:
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a MEMS display portion; and drive electronics comprising MEMS switches configured to control the display, wherein MEMS display portion and the plurality of switches are integrally formed on a single substrate; wherein the plurality of switches forms in part row or column driver circuitry.
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6. A method of making a MEMS display device, the method comprising:
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forming a MEMS display portion on a substrate using a first process; and fabricating drive electronics comprising switches formed of MEMS devices, the electronics being coupled to the display portion, wherein the switches are formed integrally with the display portion on the substrate using a second process having at least some steps in common with the first process. - View Dependent Claims (7, 8, 9, 10)
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Specification