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Interferometric modulation of radiation

  • US 7,471,444 B2
  • Filed: 06/10/2005
  • Issued: 12/30/2008
  • Est. Priority Date: 12/19/1996
  • Status: Expired due to Fees
First Claim
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1. A MEMS display device comprising:

  • a substrate of a display comprising an electronically inactive medium;

    an array of MEMS devices forming pixels of the display; and

    drive electronics comprising MEMS elements configured to drive the display,wherein the array of MEMS devices and the drive electronics are fabricated on a same surface of the substrate.

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