Stress detection method for force sensor device with multiple axis sensor and force sensor device employing this method
First Claim
1. A force sensor device that detects stress delivered in a detected axis direction comprising:
- a frame portion with outside edges of a rectangular shape;
a weight that is disposed within the frame portion; and
four flexible beams that are arranged in orthogonal axis directions that pass through the center of the weight, the respective one end of which is connected to the weight and the respective other end of which is connected to the frame portion at an inclination that forms a 45°
angle with the outside edge of the frame portion,wherein each of the four flexible beams comprises a detection element a physical quantity of which varies according to the flexibility of the beams when stress is delivered to the weight.
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Abstract
The present invention provides the stress detection method for force sensor device with multiple axis sensor device and force sensor device employing this method, whose installation angle is arbitrary. The stress detection method includes, first and second force sensors whose detection axes are orthogonal to each other. When the detection axis of first force sensor forms angle θ with direction of detected stress Ax, and the stress component of direction perpendicular to direction of the detected stress Ax is Az, output Apx of the axis direction of first force sensor is found as Apx=αx (Ax×cos θ+Az×sin θ), and output Apz of the axis direction of the second force sensor is found as Apz=αz (Ax×sin θ+Az×cos θ), and, when αx and αz are detection sensitivity coefficients of first and second force sensors respectively, the detection sensitivity coefficient αz of second force sensor is set as αz=αx tan θ, and the detected stress Ax is found as Ax=(Apx−Apz)/αx(cos θ−tan θ×sin θ).
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Citations
5 Claims
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1. A force sensor device that detects stress delivered in a detected axis direction comprising:
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a frame portion with outside edges of a rectangular shape; a weight that is disposed within the frame portion; and four flexible beams that are arranged in orthogonal axis directions that pass through the center of the weight, the respective one end of which is connected to the weight and the respective other end of which is connected to the frame portion at an inclination that forms a 45°
angle with the outside edge of the frame portion,wherein each of the four flexible beams comprises a detection element a physical quantity of which varies according to the flexibility of the beams when stress is delivered to the weight. - View Dependent Claims (2, 3, 4)
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5. A force sensor device that detects stress delivered in a detected axis direction, comprising:
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a frame portion with outside edges of a rectangular shape; a weight that is disposed within the frame portion; four flexible beams that are arranged in orthogonal axis directions that pass through the center of the weight, the respective one end of which is connected to the weight and the respective other end of which is connected to the frame portion at an inclination that forms a 45°
angle with the outside edge of the frame portion;a first electrode portion that is formed on the weight and on each of the four flexible beams; and an opposing electrode portion that is disposed to face the first electrode portion via an insulator, wherein the capacitance between the first electrode portion and the opposing electrode portion varies according to the flexibility of the beams when stress is delivered to the weight.
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Specification