Pump controller for precision pumping apparatus

• US 7,476,087 B2
• Filed: 02/04/2005
• Issued: 01/13/2009
• Est. Priority Date: 11/23/1998
• Status: Expired due to Fees

• Current Assignee: Entegris Incorporated
• Original Assignee: Entegris Incorporated
• Inventors: Zagars, Raymond A., McLoughlin, Robert F.
• Primary Examiner(s): Freay; Charles G.
• Assistant Examiner(s): Hamo; Patrick
• Application Number:
  US11/051,576
• Publication Number:
  US 20050184087A1
• Time in Patent Office: 1,439 Days
• Field of Search: 417/44.2
• US Class Current: 417/44.2
• CPC Class Codes: F04B 13/00 Pumps specially modified to deliver fixed or variable measured quantities
• CPC Class Codes: F04B 2201/0201 Position of the piston
• CPC Class Codes: F04B 2201/0601 Opening times
• CPC Class Codes: F04B 2205/03 Pressure in the compression chamber
• CPC Class Codes: F04B 43/02 having plate-like flexible members, e.g. diaphragms F04B43/14 takes precedence
• CPC Class Codes: F04B 49/065 and making use of computers
• CPC Class Codes: F04B 7/0076 the members being actuated by electro-magnetic means

Abstract

A pump controller and pump controlling method for dispensing a precise amount of low viscosity fluid are provided in which the problems of double dispenses and stuttered dispenses are avoided. In particular, the timing of the valves and motors in the pumping apparatus are adjusted to avoid these problems.

Claims

1. A pump for dispensing fluid, comprising:

a multistage pump having a feed chamber and a dispensation chamber therein connected through a series of valves and motors configured to draw fluid within the respective chambers and to dispense the fluid from the pump;

a fluid reservoir for providing fluid to the feed chamber; and

a pump controller for controlling the operation of the series of valves and motors in the pump so that fluid is passed between the feed chamber and the dispensation chamber and dispensed via an outlet valve coupled to the dispensation chamber, wherein a precise amount of fluid is dispensed without a double dispense or a sputtered dispense,

wherein the series of valves includes a barrier valve, and

wherein the pump controller is operable to keep the barrier valve closed during the dispense stage and to move at least one of the motors to compensate for any pressure increase caused by the closure of the barrier valve.

2. The pump of claim 1, wherein the

barrier valve is disposed downstream of a filter which is downstream of the feed chamber, wherein the barrier valve is controlled by the pump controller, and wherein while the barrier valve is closed an increased pressure results within the dispensation chamber;

wherein the at least one of the motors is a dispensation motor disposed in the dispensation chamber configured to operate in a forward and a reverse direction being controlled by the pump controller so that the dispensation motor is operated in the reverse direction to compensate for the pressure in the dispensation chamber such that upon the dispensation motor being operated in the forward direction the pressure in the dispensation chamber results in a zero pressure; and

wherein the outlet valve is controlled by the pump controller so that the outlet valve is completely open when the dispensation motor is started so as to dispense the fluid from the dispensation chamber upon the dispensation motor being operated in the forward direction.

3. The pump of claim 1, wherein the multistage pump comprises:

a fluid drawing means for drawing fluid from the fluid reservoir and supplying the fluid to the multistage pump;

a filtering means for filtering impurities from the fluid; and

a dispensing means for providing the filtered fluid onto an object, wherein the filtering means is disposed between the drawing means and the dispensing means.

4. The pump of claim 3, wherein the fluid drawing means comprises a feed diaphragm disposed within the feed chamber and configured to move between a first drawing position and a second purging position in accordance with a drawing force such that upon the feed diaphragm moving from the second purging position to the first drawing position, the fluid is drawn into the feed chamber via an inlet valve and upon the feed diaphragm moving from the first drawing position to the second purging position, the fluid is provided to the dispensation chamber via a feed valve.

5. The pump of claim 4, wherein the drawing force is either a vacuum force, a positive feed pressure force or an atmospheric force.

6. The pump of claim 4, further comprising a vent valve configured to remove air bubbles from the fluid.

7. The pump of claim 3, wherein the filtering means comprises a filter for removing impurities from the fluid and a vent valve for removing air bubbles from the fluid or for relieving excess pressure from the multistage pump.

8. The pump of claim 3, wherein the dispensing means comprises a dispense diaphragm disposed within the dispensation chamber and configured to move between a first drawing position and a second purging position in accordance with a drawing force such that upon the dispense diaphragm moving from the second purging position to the first drawing position, the fluid is drawn into the dispensation chamber via a feed valve and upon the dispense diaphragm moving from the first drawing position to the second purging position, the fluid is provided to the object via the outlet valve.

9. The pump of claim 8, wherein the dispensing means further comprises a hydraulic fluid chamber configured to pressurize a hydraulic fluid resident within the hydraulic fluid chamber so that the dispense diaphragm is moved between the first mad second positions when the hydraulic fluid is pressurized and so that the dispense diaphragm is moved between the second and first positions when the hydraulic fluid is depressurized.