Method for producing a mirror from a titanium-based material, and a mirror made from such a material
First Claim
1. Mirror (10) made from solely a titanium-based material having a shape accuracy and having a surface roughness in the submicrometer region, said mirror having a basic shape (11) produced from said titanium-based material with a reflecting surface (12) unitarily produced from said titanium-based material and that has a surface roughness of less than 60 nm, and a specular reflectivity of above 97% within a spectral region of between about 3.25-7 μ
- m, for focusing radiation impinging on said mirror and resultingly implementing a prescribed beam path.
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Accused Products
Abstract
A method for producing a mirror (10) from a titanium-based material by using the technique of ultraprecision machining. The mirror produced using this method has both a shape accuracy and a surface roughness in the submicrometer region. The mirror (10) is made from a titanium-based material having a shape accuracy and a surface roughness in the submicrometer region, whose basic shape (11) has a has a reflecting surface (12) having a surface roughness of less than 60 nm, and in particular of less than 30 nm.
16 Citations
11 Claims
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1. Mirror (10) made from solely a titanium-based material having a shape accuracy and having a surface roughness in the submicrometer region, said mirror having a basic shape (11) produced from said titanium-based material with a reflecting surface (12) unitarily produced from said titanium-based material and that has a surface roughness of less than 60 nm, and a specular reflectivity of above 97% within a spectral region of between about 3.25-7 μ
- m, for focusing radiation impinging on said mirror and resultingly implementing a prescribed beam path.
- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
Specification