Multi-beam heterodyne laser doppler vibrometer

• US 7,477,398 B2
• Filed: 08/21/2006
• Issued: 01/13/2009
• Est. Priority Date: 03/31/2003
• Status: Active Grant

• Current Assignee: MetroLaser, Inc.
• Original Assignee: MetroLaser, Inc.
• Inventors: Hurtado, L. Ernesto, Aranchuk, Vyacheslav, Doushkina, Valentina V., Hess, Cecil F., Lal, Amit K., Markov, Vladimir B.
• Primary Examiner(s): Lyons; Michael A
• Application Number:
  US11/507,882
• Publication Number:
  US 20070091316A1
• Time in Patent Office: 876 Days
• Field of Search: 356/486, 356/487, 356/488, 356/492, 356/493, 356/494, 356/498, 356/499, 356/502, 356/521
• US Class Current: 356/486
• CPC Class Codes: G01B 2290/70 Using polarization in the interferometer
• CPC Class Codes: G01B 9/02002 using two or more frequencies
• CPC Class Codes: G01B 9/02019 contacting different points on same face of object
• CPC Class Codes: G01B 9/02023 Indirect probing of object, e.g. via influence on cavity or fibre
• CPC Class Codes: G01B 9/02027 Two or more interferometric channels or interferometers
• CPC Class Codes: G01B 9/02045 using the Doppler effect
• CPC Class Codes: G01H 9/002 for representing acoustic field distribution sonar systems for imaging G01S7/56, G01S15/89; acoustic holography G03H3/00

Abstract

A multi-beam heterodyne vibrometer for analyzing vibration of an object includes an optical system and a combining element. The optical system generates a plurality of object beams and a plurality of reference beams where one of the plurality of beams has a frequency that is shifted from a frequency of the other plurality of beams. The optical system focuses each of the plurality of object beams on the object and transmits the plurality of focused object beams to the object. A portion of each of the plurality of focused object beams is reflected off of a surface of the object as a modulated object beam. The optical system collects the modulated object beams. The combining element combines each of the modulated object beams with a respective one of the reference beams into a plurality of beam pairs.

Claims

1. A multi-beam heterodyne vibrometer for analyzing vibration of an object, the vibrometer comprising:

an optical system for;

generating a plurality of object beams and a plurality of reference beams, one of the plurality of beams having a frequency that is shifted from a frequency of the other plurality of beams;

focusing each of the plurality of object beams on the object;

transmitting the plurality of focused object beams to the object, a portion of each of the plurality of focused object beams being reflected off of a surface of the object as a modulated object beam; and

collecting the modulated object beams; and

a combining element for combining each of the modulated object beams with a respective one of the reference beams into a plurality of beam pairs.

2. The vibrometer of claim 1 wherein the frequency shift is introduced on the one of the plurality of beams prior generating the plurality of object beams and the plurality of reference beams.

3. The vibrometer of claim 1 wherein the plurality of object beams is frequency shifted.

4. The vibrometer of claim 1 wherein the plurality of reference beams is frequency shifted.

5. The vibrometer of claim 1 wherein the plurality of modulated object beams and the plurality of reference beams have the same polarization.

6. The vibrometer of claim 1 wherein the optical system includes a lens configured to focus the plurality of object beams onto the surface of the object and for collecting the focused modulated object beams.

7. The vibrometer of claim 6 wherein the lens has a focal length and is positioned from the surface of the object by a distance substantially equal to the focal length.

8. The vibrometer of claim 6 wherein the lens satisfies the formula y′

=f tan(θ

) to yield a distortion-free image.

9. The vibrometer of claim 6 wherein each of the plurality of modulated object beams has a first diameter and the aperture has a second diameter substantially equal to the first diameter.

10. The vibrometer of claim 1,

wherein the optical system includes a first diffractive optical element for splitting an object beam into the plurality of object beams, and

wherein the optical system includes an aperture disposed at a distance from the lens that is substantially equal to the distance between the first diffractive optical element and the lens.

11. The vibrometer of claim 1 wherein the optical system includes a second diffractive optical element for splitting a reference beam into the plurality of reference beams.

12. The vibrometer of claim 11 wherein the first and second diffractive optical elements are configured to respectively split the plurality of object beams and the plurality of reference beams such that the plurality of object beams and the plurality of reference beams diverge from the respective diffractive optical elements at substantially the same angle.

13. The vibrometer of claim 1 wherein the optical system further includes:

a laser for providing an output beam; and

an output beam splitter for splitting the output beam into the object beam and a reference beam, at least one of the beams being frequency shifted prior to being split into the plurality of frequency-shifted beams.

14. The vibrometer of claim 1 further comprising a mirror for reflecting the transmitted object beams onto the object and a motor for rotating the mirror so that the transmitted object beams scan the object.

15. A method for analyzing vibration of an object, the method comprising:

transmitting a plurality of object beams to the object;

focusing each of the plurality of object beams on the object, a portion of the object beams being reflected by the object as modulated object beams;

collecting the modulated object beams; and

combining the modulated object beams with a reference beam into a plurality of combined beams, wherein one of the combined beams has a frequency that is shifted from a frequency of the other of the combined beams.

16. The method of claim 15, wherein the operation of focusing each of the plurality of object beams on the object includes the use of a lens satisfying the formula y′

=f tan(θ

) to yield a distortion-free image.

17. The method of claim 15, further comprising:

analyzing a plurality of combined beams to determine a vibration pattern of the object.

18. A multi-beam heterodyne vibrometer for analyzing vibration of an object, the vibrometer comprising:

an optical system, comprising;

a generating means for generating a plurality of object beams and a plurality of reference beams, one of the plurality of beams having a frequency that is shifted from a frequency of the other plurality of beams;

a focusing means for focusing each of the plurality of object beams on the object;

a transmitting means for transmitting the plurality of focused object beams to the object, a portion of each of the plurality of focused object beams being reflected off of a surface of the object as a modulated object beam; and

a collecting means for collecting the modulated object beams; and

a combining element for combining each of the modulated object beams with a respective one of the reference beams into a plurality of beam pairs.

19. The vibrometer of claim 18 wherein the focusing means includes a lens configured to focus the plurality of object beams onto the surface of the object and for collecting the focused modulated object beams, and

wherein the lens has a focal length and is positioned from the surface of the object by a distance substantially equal to the focal length.

20. The vibrometer of claim 19 wherein the lens satisfies the formula y′

=f tan(θ

) to yield a distortion-free image.