Trench measurement system employing a chromatic confocal height sensor and a microscope
First Claim
1. An apparatus for measuring height of selected locations in micrometer and submicrometer surfaces;
- the apparatus comprising;
a chromatic confocal height sensor and an optical microscope, said sensor and said microscope having a common optical path and a common objective lens for simultaneously examining substantially the same location on a surface at disparate wavelengths of light.
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Accused Products
Abstract
A system for the measurement of high aspect ratio trenches. The preferred embodiment consists of three elements: a) an integrated microscope and optical height sensor, b) an axially dispersive, afocal lens system, which is included in the optical height sensor, and c) an algorithm for processing the optical height sensor data to produce the depth of the high aspect ratio trench. The present invention combines a traditional imaging microscope with a chromatic confocal, single point, height sensor. This combination instantaneously provides an image of the object and the height value at one point in the image. No mechanical movement is necessary anywhere in the system to achieve that result. The chromatic confocal height sensor is integrated with a traditional microscope through the use of separate wavelength bands such as a wavelength band in the visible part of the spectrum, and a wavelength band in the infrared or ultraviolet part of the spectrum.
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Citations
10 Claims
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1. An apparatus for measuring height of selected locations in micrometer and submicrometer surfaces;
- the apparatus comprising;
a chromatic confocal height sensor and an optical microscope, said sensor and said microscope having a common optical path and a common objective lens for simultaneously examining substantially the same location on a surface at disparate wavelengths of light. - View Dependent Claims (2, 3, 4)
- the apparatus comprising;
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5. An apparatus for measuring the depth of trenches in submicrometer surfaces, the apparatus comprising:
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a chromatic confocal height sensor having a light source transmitting light through a fiber optic coupler and through an afocal dispersive lens system and an objective lens onto a submicrometer surface to be measured and having a spectrometer for analyzing the wavelength composition of light returning through said fiber optic coupler to determine at which wavelength peak power of returning light occurs to measure trench depth therefrom; a microscope operating at a wavelength not analyzed by said spectrometer and sharing said objective lens by the use of beam splitting, said microscope providing an overview of an area of said surface for aiding in the measurement of trench depth by said height sensor. - View Dependent Claims (6, 7, 8, 9)
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10. A method for measuring height characteristics in a submicrometer surface;
- the method comprising the steps of;
a) providing a combined chromatic confocal height sensor and microscope for examining a selected location in said surface; b) determining whether or not the microscope image of said selected location contains a line object; c) if the outcome of step b) is negative, then using said height sensor to detect a peak indication of surface height; d) if the outcome of step b) is positive, then measuring the width of the line object and positioning the height sensor at the center of the line object; e) determining whether the line width is sufficiently large to generate a single peak indication of trench depth; f) if the outcome of step e) is positive, then using said height sensor to detect a peak indication of trench depth; and g) if the outcome of step e) is negative, then using measured line width and other available information for carrying out a double peak indication of trench depth.
- the method comprising the steps of;
Specification