Capacitive pressure sensor with a cantilever member
First Claim
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1. A capacitive pressure sensing device comprising:
- a base member;
a diaphragm member deflectable under an external pressure;
a cantilever member disposed between the base member and the diaphragm member and supported on a support structure; and
a contact member moveable relative to the cantilever member under deflection of the diaphragm member and separated by a gap from the cantilever member in a state when no pressure is applied to the diaphragm member,wherein the base member and the cantilever member form acapacitor structure of the device, andwherein deflection of the diaphragm member beyond a threshold value causes the contact member to contact the cantilever member causing the cantilever member to deflect to cause a capacitive change in the capacitor structure.
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Abstract
A capacitive pressure sensing device comprising, a base member, a diaphragm member deflectable under an external pressure, a cantilever member disposed between the base member and the diaphragm member and supported on a support structure, wherein the base member and the cantilever member form a capacitor structure of the device and wherein deflection of the diaphragm member beyond a threshold value causes the cantilever member to deflect to cause a capacitive change in the capacitor structure.
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Citations
18 Claims
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1. A capacitive pressure sensing device comprising:
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a base member; a diaphragm member deflectable under an external pressure; a cantilever member disposed between the base member and the diaphragm member and supported on a support structure; and a contact member moveable relative to the cantilever member under deflection of the diaphragm member and separated by a gap from the cantilever member in a state when no pressure is applied to the diaphragm member, wherein the base member and the cantilever member form acapacitor structure of the device, and wherein deflection of the diaphragm member beyond a threshold value causes the contact member to contact the cantilever member causing the cantilever member to deflect to cause a capacitive change in the capacitor structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method of pressure sensing comprising:
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providing a contact member moveable relative to the cantilever member under deflection of a diaphragm member and separated by a gap from the cantilever member in a state when no pressure is applied to a diaphragm member; and deflecting the diaphragm member under an external pressure beyond a threshold value to cause the contact member to contact the cantilever member causing the cantilever member to deflect under the influence of the diaphragm member, wherein deflection of the cantilever member causes a capacitive change in a capacitive structure including the cantilever member.
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14. A method of fabricating a pressure sensing device comprising:
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forming a base member; forming a diaphragm member deflectable under an external pressure; forming a cantilever member disposed between the base member and the diaphragm member and supported on a support structure; forming a contact member moveable relative to the cantilever member under deflection of the diaphragm member and separated by a gap from a cantilever member in a state when no pressure is applied to the diaphragm member; wherein the base member and the cantilever member form a capacitor structure of the device; and wherein deflection of the diaphragm member beyond a threshold value causes the contact member to contact the cantilever member causing the cantilever member to deflect to cause a capacitive change in the capacitor structure. - View Dependent Claims (15, 16, 17, 18)
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Specification