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Capacitive pressure sensor with a cantilever member

  • US 7,478,559 B2
  • Filed: 12/03/2004
  • Issued: 01/20/2009
  • Est. Priority Date: 12/04/2003
  • Status: Expired due to Fees
First Claim
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1. A capacitive pressure sensing device comprising:

  • a base member;

    a diaphragm member deflectable under an external pressure;

    a cantilever member disposed between the base member and the diaphragm member and supported on a support structure; and

    a contact member moveable relative to the cantilever member under deflection of the diaphragm member and separated by a gap from the cantilever member in a state when no pressure is applied to the diaphragm member,wherein the base member and the cantilever member form acapacitor structure of the device, andwherein deflection of the diaphragm member beyond a threshold value causes the contact member to contact the cantilever member causing the cantilever member to deflect to cause a capacitive change in the capacitor structure.

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