Photonic crystal biosensor structure and fabrication method

• US 7,479,404 B2
• Filed: 07/08/2005
• Issued: 01/20/2009
• Est. Priority Date: 07/08/2005
• Status: Active Grant

• Current Assignee: Board of Trustees of The University of Illinois
• Original Assignee: Board of Trustees of The University of Illinois
• Inventors: Block, Ian, Chan, Leo Li-Ying, Cunningham, Brian T.
• Primary Examiner(s): Picardat; Kevin M
• Application Number:
  US11/177,708
• Publication Number:
  US 20070009968A1
• Time in Patent Office: 1,292 Days
• Field of Search: 438/31, 438/32, 438/69, 438/71, 438/72, 438/87
• US Class Current: 438/69
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: G01N 33/54373 involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings
• CPC Class Codes: G02B 6/1225 comprising photonic band-gap structures or photonic lattices

Abstract

The invention provides sensor compositions and method of making sensors.

Claims

1. A method of making a sensor comprising:

(a) putting a liquid elastomer into a sub-wavelength period grating structure mold and curing the liquid elastomer to a form a negative mold;

(b) removing the negative mold from the mold;

(c) setting the negative mold into an uncured nanoporous film, wherein the uncured nanoporous film is supported by a substrate;

(d) allowing the nanoporous film to fully cure, partially cure or not cure;

(e) removing the negative mold from the fully cured, partially cured, or uncured nanoporous film;

(f) depositing a high dielectric constant dielectric material onto the fully cured, partially cured, or uncured nanoporous film, wherein a sensor is formed.

2. The method of claim 1, wherein the nanoporous film comprises porous silica xerogel, porous aerogels, porous hydrogen silsesquioxane, a B staged polymer, porous methyl silsesquioxane, porous poly(arylene ether), or combinations thereof.

3. The method of claim 1, wherein the substrate comprises plastic, epoxy, or glass.

4. The method of claim 1, wherein the high dielectric constant dielectric material is tin oxide, tantalum pentoxide, zinc sulfide, titanium dioxide, silicon nitride, or a combination thereof.

5. The method of claim 1, wherein the refractive index of the high dielectric constant dielectric material is from about 1.8 to about 3.0.

6. The method of claim 1, further comprising depositing a cover layer on the high dielectric constant dielectric material.

7. The method of claim 1, further comprising immobilizing one or more specific binding substances on the surface of the high dielectric constant dielectric material.

8. The method of claim 6, further comprising immobilizing one or more specific binding substances on the surface of the cover layer.

9. The method of claim 7, wherein the one or more specific binding substances do not comprise a detection label.

10. The method of claim 8, wherein the one or more specific binding substances do not comprise a detection label.

11. The method of claim 1, wherein the refractive index of the nanoporous film is from about 1.1 to about 2.2.

12. The method of claim 1, wherein the refractive index of the nanoporous film is from about 1.1 to about 1.5.

13. The method of claim 1, wherein the period of the sub-wavelength period grating structure is from about 200 nm to about 1,500 nm and the depth of the sub-wavelength period grating structure is from about 50 nm to about 900 nm.

14. The method of claim 1, wherein the refractive index of the substrate is about 1.4 to about 1.6.

15. The method of claim 1, wherein the thickness of the high dielectric constant dielectric material is about 30 nm to about 700 nm and the thickness of the nanoporous film is about 10 mn to about 5,000 nm.

16. A method of making a sensor comprising:

(a) curing a layer of nanoporous material having a low refractive index onto a substrate;

(b) depositing a high dielectric constant dielectric material on top of the nanoporous material; and

(c) patterning the high dielectric constant dielectric material into a sub-wavelenth period grating structure.

17. The method of claim 16, wherein the nanoporous material comprises porous silica xerogel, porous aerogels, porous hydrogen silsesquioxane, a B staged polymer, porous methyl silsesquioxane, porous poly(arylene ether), or combinations thereof.

18. The method of claim 16, wherein the substrate comprises plastic, epoxy, or glass.

19. The method of claim 16, wherein the high dielectric constant dielectric material is tin oxide, tantalum pentoxide, zinc sulfide, titanium dioxide, silicon nitride, or a combination thereof.

20. The method of claim 16, wherein the refractive index of the high dielectric constant dielectric material is about 1.8 to about 3.0.

21. The method of claim 16, further comprising depositing a cover layer on the high refractive index dielectric material.

22. The method of claim 16, further comprising immobilizing one or more specific binding substances on the surface of the high refractive index dielectric material.

23. The method of claim 21, further comprising immobilizing one or more specific binding substances on the surface of the cover layer.

24. The method of claim 22, wherein the one or more specific binding substances do not comprise a detection label.

25. The method of claim 23, wherein the one or more specific binding substances do not comprise a detection label.

26. The method of claim 16, wherein the refractive index of the nanoporous material is from about 1.1 to about 2.2.

27. The method of claim 16, wherein the refractive index of the nanoporous material is from about 1.1 to about 1.5.

28. The method of claim 16, wherein the period of the sub-wavelength period grating structure is about 200 nm to about 1,500 nm and the depth of the sub-wavelength period grating structure is about 50 nm to about 900 nm.

29. The method of claim 16, wherein the refractive index of the substrate is about 1.4 to about 1.6.

30. The method of claim 16, wherein the thickness of the high dielectric constant dielectric material is about 30 nm to about 700 nm and the thickness of the nanoporous material is about 10 mn to about 5,000 nm.