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Method and apparatus for flag-less water bonding tool

  • US 7,479,441 B2
  • Filed: 10/13/2006
  • Issued: 01/20/2009
  • Est. Priority Date: 10/14/2005
  • Status: Expired due to Fees
First Claim
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1. A method for forming multi-layered materials, the method comprising:

  • providing a first substrate having a first backside surface supported on a first porous chuck, and a first surface region, the first surface region being characterized by a first end and a second end;

    providing a second substrate having a second backside surface supported on a second porous chuck, and a second surface region, the second surface region being characterized by a third end and a fourth end;

    initiating a physical contact of a first predetermined portion of the first end of the first surface region with a second predetermined portion of the third end of the second surface region, while maintaining utilizing the first and second porous chucks, other portions of the first surface region and the second surface region substantially free from joining the other portions of the first surface region to the second surface region;

    causing a bond wave to form by an interface region within a vicinity of the first predetermined portion and the second predetermined portion;

    moving, using a controlled process, the bond wave from the first end of the first surface and the third end of the second surface to the second end of the first surface and the fourth end of the second surface while maintaining a determined velocity of the bond wave to form a continuous interface to join the first surface of the first substrate with the second surface of the second surface.

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