Configuration for N consumers of electric energy, of which M consumers are simultaneously supplied with energy

• US 7,479,712 B2
• Filed: 10/27/2003
• Issued: 01/20/2009
• Est. Priority Date: 09/10/2003
• Status: Expired due to Fees

• Current Assignee: Applied Materials GmbH & Co., KG (Applied Materials Incorporated)
• Original Assignee: Applied Materials GmbH & Co., KG (Applied Materials Incorporated)
• Inventors: Richert, Holger, Morbe, Wolfgang
• Primary Examiner(s): Jackson; Stephen W
• Assistant Examiner(s): BAUER, SCOTT ALLEN
• Application Number:
  US10/694,530
• Publication Number:
  US 20050052803A1
• Time in Patent Office: 1,912 Days
• Field of Search: 361/82, 361/29, 361/38, 307/29
• US Class Current: 307/29
• CPC Class Codes: H02J 1/10 Parallel operation of dc sources

Abstract

The invention relates to a configuration for several consumers of electric energy, with these consumers having either the same electric power or different electric powers. Since, as a rule, not all consumers need to be supplied simultaneously with electric energy, for example if, due to maintenance work, some are not in operation, a modular energy supply system is provided, which is comprised of several interconnectable modules. This makes it possible for each consumer to be supplied from small units with the power it requires.

Claims

1. A configuration for n consumers of electric energy, of which m consumers are supplied simultaneously with energy, wherein at any time m<

n, and whereby a modular energy supply comprising k energy modules is provided, and whereby the sum of the power supplyable by the k energy modules is smaller than the power which would be necessary, if all n consumers simultaneously required electrical power, wherein a control is provide which connects as many energy modules to respective one of the m consumers so that this consumer receives the power required by said consumer.

2. The configuration as claimed in claim 1, wherein that the consumers are sputter installations, with each cathode of a sputter installation having its own arc management.

3. The configuration as claimed in claim 1, wherein the electric energy is realized by DC current.

4. The configuration as claimed in claim 1, wherein the electric energy is realized by AC current.

5. The configuration as claimed in claim 1, wherein the electric energy is realized by pulsed DC current.

6. The configuration as claimed in claim 2, wherein each cathode is provided with its own adaptation network.

7. The configuration as claimed in claim 3, wherein each cathode is provided with its own adaptation network.

8. The configuration as claimed in claim 4, wherein each cathode is provided with its own adaptation network.

9. The configuration as claimed in claim 1, wherein the consumers are sputter installations with each installation including two cathodes to which one pole reversal unit is assigned.

10. The configuration as claimed in claim 1, wherein the consumers are sputter installations with each installation including two cathodes, of which the one cathode is connected to a pole of an AC voltage and the other cathode to the other pole of this AC voltage.

11. The configuration as claimed in claim 2, wherein a pulse generator is assigned to each cathode.

12. The configuration of claim 1, wherein each of the k energy modules have the same electrical power.