Semiconductor memory device
First Claim
1. A semiconductor memory device, comprising:
- a plurality of memory cells arranged in row and columns, each of said memory cells including a capacitor including a cell plate electrode and a storage electrode arranged facing to said cell plate electrode, for accumulating electric charges corresponding to storage data;
a plurality of word lines arranged corresponding to the rows of memory cells and each connecting to the memory cells in a corresponding row, said word lines being formed in a same interconnection layer as the cell plate electrodes;
a plurality of bit lines arranged corresponding to the columns of memory cells and each connecting to the memory cells on a corresponding column, the bit lines being arranged in pairs and bit lines in each pair being arranged with a bit line of other pair interposed in between; and
row selecting circuitry for selecting an addressed word line out of the word lines in accordance with an address signal, the memory cells being arranged such that data in selected memory cells on an addressed row are simultaneously read out onto bit lines in a pair by a selected word line, said row selecting circuitry selecting one word line out of the word lines in accordance with the address signal.
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Accused Products
Abstract
Conductive lines constituting word lines of memory cells and conductive lines constituting memory cell plate electrodes are formed in the same interconnecting layer in a memory device including a plurality of memory cells each including a capacitor for storing data in an electrical charge form. By forming the capacitors of the memory cells into a planar capacitor configuration, a step due to the capacitors is removed. Thus a dynamic semiconductor memory device can be formed through CMOS process, and a dynamic semiconductor memory device suitable for merging with logic is achieved. Data of 1 bit is stored by two memory cells, and data can be reliably stored even if the capacitance value of the memory cell is reduced due to the planar type capacitor.
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Citations
9 Claims
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1. A semiconductor memory device, comprising:
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a plurality of memory cells arranged in row and columns, each of said memory cells including a capacitor including a cell plate electrode and a storage electrode arranged facing to said cell plate electrode, for accumulating electric charges corresponding to storage data; a plurality of word lines arranged corresponding to the rows of memory cells and each connecting to the memory cells in a corresponding row, said word lines being formed in a same interconnection layer as the cell plate electrodes; a plurality of bit lines arranged corresponding to the columns of memory cells and each connecting to the memory cells on a corresponding column, the bit lines being arranged in pairs and bit lines in each pair being arranged with a bit line of other pair interposed in between; and row selecting circuitry for selecting an addressed word line out of the word lines in accordance with an address signal, the memory cells being arranged such that data in selected memory cells on an addressed row are simultaneously read out onto bit lines in a pair by a selected word line, said row selecting circuitry selecting one word line out of the word lines in accordance with the address signal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification