Automated manufacturing system and method for processing photomasks

• US 7,480,539 B2
• Filed: 07/08/2005
• Issued: 01/20/2009
• Est. Priority Date: 03/14/2002
• Status: Expired due to Term

• Current Assignee: Phototronics Incorporated
• Original Assignee: Phototronics Incorporated
• Inventors: Vo, Ryan T., Morrison, James P., Spano, Mary R., Jones, Peter F., Croke, Charles, Mills, Edward Arthur, Suttile, Edward J.
• Primary Examiner(s): Kosowski; Alexander J
• Application Number:
  US11/177,459
• Publication Number:
  US 20050246049A1
• Time in Patent Office: 1,292 Days
• Field of Search: 700/97, 700/121, 716 19- 21, 430/5
• US Class Current: 700/121
• CPC Class Codes: G06Q 10/06 Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling

Abstract

The present invention relates generally to an automated manufacturing system and method for manufacturing photomasks wherein information provided by a customer at a remote location is interfaced, via a network, to a photomask manufacturer'"'"'s computer system and automatically processes data for manufacturing a photomask and automatically formats and routes data to processing equipment. The present invention reduces the need for manual intervention, thereby avoiding costly delays and transcription errors associated therewith. The software of the present invention provides for automatic generation of data arrays, which can be used to process and monitor the status of a photomask during manufacture. Further, the software is capable of automatically modifying design data provided by a photomask user. Additionally, the software of the present invention includes an automatic messaging system which can notify users of the system, of status and errors in manufacture of photomasks. The present invention also includes a real time monitoring system capable of notifying users of the status and errors in the processing of the photomask during manufacture.

Claims

1. An automated system used for manufacturing a photomask comprising a computer readable medium containing instructions executable on a processor to perform a method comprising the following steps:

receiving photomask order data from a photomask customer;

extracting information from said photomask order data;

arranging said extracted information in formats suitable for specified photomask manufacturing tasks, the photomask manufacturing tasks comprising at least one of the following types of tasks;

electronic critical dimension plotting, SEMI specification plotting, bar coding, registration measure file creation, data sizing and double checking; and

removing extraneous information from said extracted information to account for the manufacturing tasks that are intended to actually be performed in manufacturing said photomask.

2. An automated system used for manufacturing a photomask comprising a computer readable medium containing instructions executable on a processor to perform a method comprising the following steps:

receiving incomplete photomask order data from a photomask customer;

extracting information from said photomask order data;

arranging said extracted information in formats suitable for specified photomask manufacturing tasks; and

modifying said extracted information to account for information missing from the incomplete photomask order data by adding information to the extracted information.

3. The system of claim 2, wherein said added information comprises said photomask customer'"'"'s business requirements.

4. The system of claim 3, wherein said photomask customer'"'"'s business requirements comprise a preferred delivery address.

5. The automated system of claim 2, wherein said added information comprises manufacturing information.