Micro-electro-mechanical sensor with force feedback loop
First Claim
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1. A method for determining characteristics of a rotating system, comprising the steps of:
- maintaining a first mass in oscillation at a resonance frequency along a first axis;
coupling a second mass to the first mass via a mechanical means;
determining feedback voltages via an analog force feedback loop, the analog force feedback loop acting on the second mass, comprising the steps of;
receiving reading currents indicative of a velocity of the second mass along a second axis,converting the reading currents to reading voltages, the reading voltages indicative of a displacement of the second mass relative to a rest position along the second axis, andfiltering the reading voltages to generate the feedback voltages; and
applying the feedback voltages to the second mass, the feedback voltages tending to restore the second mass to the rest position.
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Abstract
A micro-electro-mechanical sensor includes a microstructure having a mass which is movable with respect to a rest position, according to a predetermined degree of freedom, and a displacement-detecting device for detecting a displacement of the mass according to the predetermined degree of freedom. The displacement-detecting device includes a force feedback loop of a purely analog type, which supplies electrostatic forces tending to restore the mass to the rest position in response to a displacement of the mass according to the predetermined degree of freedom.
48 Citations
7 Claims
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1. A method for determining characteristics of a rotating system, comprising the steps of:
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maintaining a first mass in oscillation at a resonance frequency along a first axis; coupling a second mass to the first mass via a mechanical means; determining feedback voltages via an analog force feedback loop, the analog force feedback loop acting on the second mass, comprising the steps of; receiving reading currents indicative of a velocity of the second mass along a second axis, converting the reading currents to reading voltages, the reading voltages indicative of a displacement of the second mass relative to a rest position along the second axis, and filtering the reading voltages to generate the feedback voltages; and applying the feedback voltages to the second mass, the feedback voltages tending to restore the second mass to the rest position. - View Dependent Claims (2, 3, 4, 5)
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6. An integrated micro-electro-mechanical gyroscope, comprising:
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means for maintaining a first mass in oscillation at a resonance frequency along a first axis; means for mechanically coupling a second mass to the first mass; means for determining feedback voltages via an analog force feedback loop, the analog force feedback loop acting on the second mass, including means for receiving reading currents indicative of a velocity of the second mass along a second axis, means for converting the reading currents to reading voltages, the reading voltages indicative of a displacement of the second mass relative to a rest position along the second axis, and means for filtering the reading voltages to generate the feedback voltages; and means for applying the feedback voltages to the second mass, the feedback voltages tending to restore the second mass to the rest position. - View Dependent Claims (7)
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Specification