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Micro-electro-mechanical sensor with force feedback loop

  • US 7,481,111 B2
  • Filed: 08/22/2007
  • Issued: 01/27/2009
  • Est. Priority Date: 08/03/2004
  • Status: Active Grant
First Claim
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1. A method for determining characteristics of a rotating system, comprising the steps of:

  • maintaining a first mass in oscillation at a resonance frequency along a first axis;

    coupling a second mass to the first mass via a mechanical means;

    determining feedback voltages via an analog force feedback loop, the analog force feedback loop acting on the second mass, comprising the steps of;

    receiving reading currents indicative of a velocity of the second mass along a second axis,converting the reading currents to reading voltages, the reading voltages indicative of a displacement of the second mass relative to a rest position along the second axis, andfiltering the reading voltages to generate the feedback voltages; and

    applying the feedback voltages to the second mass, the feedback voltages tending to restore the second mass to the rest position.

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