Apparatuses for and methods of monitoring optical radiation parameters for substrate processing operations
First Claim
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1. A sensor apparatus for measuring optical radiation from within a process chamber, the process chamber being configured for processing workpieces with a process that involves optical radiation, the sensor apparatus comprising:
- a substantially planar window, the window being substantially transparent to the optical radiation;
at least one sensor for measuring the optical radiation, the at least one sensor having an electrical conductivity response to exposure to the optical radiation, the at least one sensor having a dark resistance of no more than about 2 mega-ohms and a fully illuminated resistance of no less than about 10,000 ohms;
electrical conductors forming electrical connections for the at least one sensor;
a base joined with the window so as to substantially encapsulate the at least one sensor and the electrical conductors therebetween; and
a controller electrically connected with the electrical conductors whereby the controller is configured to send and receive electrical signals via the electrical conductors, the controller being supported by the base.
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Abstract
One or more problems related to processing workpieces using processes that involve optical radiation are presented along with solutions to one or more of the problems. One embodiment of the invention comprises a sensor apparatus for collecting optical radiation data representing one or more process conditions used for processing a workpiece. In a further embodiment, the sensor apparatus is also configured for measuring data other than optical radiation.
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Citations
25 Claims
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1. A sensor apparatus for measuring optical radiation from within a process chamber, the process chamber being configured for processing workpieces with a process that involves optical radiation, the sensor apparatus comprising:
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a substantially planar window, the window being substantially transparent to the optical radiation; at least one sensor for measuring the optical radiation, the at least one sensor having an electrical conductivity response to exposure to the optical radiation, the at least one sensor having a dark resistance of no more than about 2 mega-ohms and a fully illuminated resistance of no less than about 10,000 ohms; electrical conductors forming electrical connections for the at least one sensor; a base joined with the window so as to substantially encapsulate the at least one sensor and the electrical conductors therebetween; and a controller electrically connected with the electrical conductors whereby the controller is configured to send and receive electrical signals via the electrical conductors, the controller being supported by the base. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A sensor apparatus for measuring optical radiation from within a process chamber, the process chamber being configured for processing workpieces with a process that involves optical radiation, the sensor apparatus comprising:
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a substantially planar window, the window being substantially transparent; a substantially planar photosensitive sheet having an electrical conductivity responsive to exposure to optical radiation, the sheet having a dark resistance of no more than about 2 mega-ohms and a fully illuminated resistance of no less than about 10,000 ohms; electrical conductors applied to the photosensitive sheet so as to form ohmic contacts to the photosensitive sheet, the electrical conductors being arranged so as to define nodes of a crosspoint network of regions of the sheet; a controller electrically connected with the electrical conductors so as to send and receive electrical signals via the electrical conductors; a base joined with the window so as to substantially encapsulate the photosensitive sheet and the electrical conductors therebetween; and one or more additional sensors other than optical radiation sensors disposed between the base and the window. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. An apparatus comprising:
- a plurality of output electrical conductors;
a plurality of input electrical conductors;
a plurality of optical radiation sensors capable of presenting optical radiation measurements as electrical resistance, each of the sensors having a dark resistance of no more than about 2 mega-ohms and a fully illuminated resistance of no less than about 10,000 ohms, each of the sensors being connected with one of the output electrical conductors and one of the input electrical conductors so as to form an array of crosspoint connections; and
a controller connected with the output electrical conductors and with the input electrical conductors, the controller being configured so as to apply electrical signals to the output electrical conductors, the controller being configured so as to measure electrical signals received from the input electrical conductors so that application of electrical signals to the output electrical conductors and measurement of electrical signals at the input electrical conductors provide sufficient information to derive the optical radiation measurements. - View Dependent Claims (23, 24, 25)
- a plurality of output electrical conductors;
Specification