Yokeless hidden hinge digital micromirror device with double binge layer
First Claim
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1. A display system, comprising:
- a light source for producing a light beam along a light path; and
a micromirror device in the light path for selectively reflecting portions of the light beam along a second light path toward an image plane, the micromirror device comprising;
a substrate; and
an array of pixel elements, each pixel element comprising;
a mirror disposed along a first plane outwardly from the substrate;
a hinge layer disposed along a second plane inwardly from the mirror and pivotally coupled to the mirror by a hinge;
one or more address electrodes disposed along a fourth plane between the hinge layer and the substrate; and
one or more electrical components disposed along a third plane between the one or more address electrodes and the hinge layer.
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Abstract
A micromirror array 110 fabricated on a semiconductor substrate 11. The array 110 is comprised of four operating layers 12, 13, 14, 15. An addressing layer 12 is fabricated on the substrate. A raised electrode layer 13 is spaced above the addressing layer by an air gap. A hinge layer 14 is spaced above the raised electrode layer 13 by another air gap. A mirror layer 15 is spaced over the hinge layer 14 by a third air gap.
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Citations
2 Claims
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1. A display system, comprising:
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a light source for producing a light beam along a light path; and a micromirror device in the light path for selectively reflecting portions of the light beam along a second light path toward an image plane, the micromirror device comprising; a substrate; and an array of pixel elements, each pixel element comprising; a mirror disposed along a first plane outwardly from the substrate; a hinge layer disposed along a second plane inwardly from the mirror and pivotally coupled to the mirror by a hinge; one or more address electrodes disposed along a fourth plane between the hinge layer and the substrate; and one or more electrical components disposed along a third plane between the one or more address electrodes and the hinge layer. - View Dependent Claims (2)
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Specification