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Yokeless hidden hinge digital micromirror device with double binge layer

  • US 7,483,199 B2
  • Filed: 08/07/2006
  • Issued: 01/27/2009
  • Est. Priority Date: 01/31/2002
  • Status: Expired due to Term
First Claim
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1. A display system, comprising:

  • a light source for producing a light beam along a light path; and

    a micromirror device in the light path for selectively reflecting portions of the light beam along a second light path toward an image plane, the micromirror device comprising;

    a substrate; and

    an array of pixel elements, each pixel element comprising;

    a mirror disposed along a first plane outwardly from the substrate;

    a hinge layer disposed along a second plane inwardly from the mirror and pivotally coupled to the mirror by a hinge;

    one or more address electrodes disposed along a fourth plane between the hinge layer and the substrate; and

    one or more electrical components disposed along a third plane between the one or more address electrodes and the hinge layer.

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