Yokeless hidden hinge digital micromirror device with double binge layer

• US 7,483,199 B2
• Filed: 08/07/2006
• Issued: 01/27/2009
• Est. Priority Date: 01/31/2002
• Status: Expired due to Term

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: DiCarlo, Anthony
• Primary Examiner(s): Dang; Hung X
• Assistant Examiner(s): Tra; Tuyen Q
• Application Number:
  US11/462,747
• Publication Number:
  US 20060268391A1
• Time in Patent Office: 904 Days
• Field of Search: 359/291, 359/292, 359/295, 359/298, 359/223, 359/224, 359/320, 359/322, 353/98, 353/99
• US Class Current: 359/291
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: Y10S 359/904 Micromirror

Abstract

A micromirror array 110 fabricated on a semiconductor substrate 11. The array 110 is comprised of four operating layers 12, 13, 14, 15. An addressing layer 12 is fabricated on the substrate. A raised electrode layer 13 is spaced above the addressing layer by an air gap. A hinge layer 14 is spaced above the raised electrode layer 13 by another air gap. A mirror layer 15 is spaced over the hinge layer 14 by a third air gap.

Claims

1. A display system, comprising:

a light source for producing a light beam along a light path; and

a micromirror device in the light path for selectively reflecting portions of the light beam along a second light path toward an image plane, the micromirror device comprising;

a substrate; and

an array of pixel elements, each pixel element comprising;

a mirror disposed along a first plane outwardly from the substrate;

a hinge layer disposed along a second plane inwardly from the mirror and pivotally coupled to the mirror by a hinge;

one or more address electrodes disposed along a fourth plane between the hinge layer and the substrate; and

one or more electrical components disposed along a third plane between the one or more address electrodes and the hinge layer.

2. The display system of claim 1, further comprising one or more spring tips disposed outwardly from the substrate and operable to provide a mechanical stop for the mirror.