Gyro sensor and sensor apparatus using same
First Claim
1. A gyro sensor comprising a primary base plate formed of a semiconductor substrate and provided with a detection mass body, a driven mass body and a detecting element, said detection mass body being displaceably supported relative to a support base plate in a plane along said support base plate through at least two detection springs having one end fixed to said support base plate, said driven mass body being connected to said detection mass body through a drive spring and configured to vibrate in a direction intersecting said support base plate, said detecting element configured to detect a displacement amount of said detection mass body in the plane along said support base plate, wherein said detection spring extends from said detection mass body in only one direction along said support base plate so as to support said detection mass body relative to said support base plate in a cantilever manner, the at least two detection springs each extending from said detection mass body in said only one direction and having flexibility in a displacement direction of said detection mass body, wherein respective distal ends of said at least two detection springs are connected to one another continuously and integrally through a coupling segment, said coupling segment having an intermediate portion fixed to said support base plate.
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Abstract
Disclosed is a gyro sensor, which comprises a primary base plate (1) and a support base plate (2) which are superimposed on one another. The primary base plate (1) is provided with a driven mass body (11) to be driven in such a manner as to be vibrated in a direction intersecting with a surface of the support base plate (2), and a detection mass body (12) coupled with the driven mass body (11) through a drive spring (13) and adapted to be displaceable in a plane along the support base plate (2). Two detection springs (15) extending in the arranging direction of the driven mass body (11) and the detection mass body (12) are connected, respectively, to opposite side of the detection mass body (12), and the other ends of the detection springs (15) are connected together through a coupling segment (16). A fixing segment (17) provided at a longitudinally intermediate portion of the coupling segment (16) is fixed to the support base plate (2). A member formed by integrating the driven mass body (11) and the detection mass body (12) through the drive spring (13) is supported relative to the support base plate (2) by the detection springs (15) in a cantilever manner.
26 Citations
15 Claims
- 1. A gyro sensor comprising a primary base plate formed of a semiconductor substrate and provided with a detection mass body, a driven mass body and a detecting element, said detection mass body being displaceably supported relative to a support base plate in a plane along said support base plate through at least two detection springs having one end fixed to said support base plate, said driven mass body being connected to said detection mass body through a drive spring and configured to vibrate in a direction intersecting said support base plate, said detecting element configured to detect a displacement amount of said detection mass body in the plane along said support base plate, wherein said detection spring extends from said detection mass body in only one direction along said support base plate so as to support said detection mass body relative to said support base plate in a cantilever manner, the at least two detection springs each extending from said detection mass body in said only one direction and having flexibility in a displacement direction of said detection mass body, wherein respective distal ends of said at least two detection springs are connected to one another continuously and integrally through a coupling segment, said coupling segment having an intermediate portion fixed to said support base plate.
Specification