Suspended gas distribution manifold for plasma chamber

• US 7,484,473 B2
• Filed: 06/15/2004
• Issued: 02/03/2009
• Est. Priority Date: 01/20/2000
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Shang, Quanyuan, Keller, Ernst
• Primary Examiner(s): Zervigon; Rudy
• Application Number:
  US10/869,563
• Publication Number:
  US 20050000432A1
• Time in Patent Office: 1,694 Days
• Field of Search: 118/723.R, 118/715, 118/715.E, 118/715.ER, 156/345.29, 156/345.33, 156/345.26, 156/345.43
• US Class Current: 118/723.00R
• CPC Class Codes: C23C 16/455 characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: C23C 16/5096 Flat-bed apparatus
• CPC Class Codes: H01J 37/3244 Gas supply means
• CPC Class Codes: Y10T 29/49948 Multipart cooperating fastener [e.g., bolt and nut]

Abstract

A gas inlet manifold for a plasma chamber having a perforated gas distribution plate suspended by a side wall comprising one or more sheets. The sheets preferably provide flexibility to alleviate stress in the gas distribution plate due to thermal expansion and contraction. In another aspect, the side wall provides thermal isolation between the gas distribution plate and other components of the chamber.

Claims

1. A gas inlet manifold for a plasma chamber, comprising:

a top wall including a gas inlet orifice;

a gas distribution plate including a plurality of gas outlet orifices, wherein the gas distribution plate is spaced away from the top wall, and

a side wall including one or more side wall segments, wherein each side wall segment includes an upper portion, a lower flange, and a vertically oriented sheet extending between the upper portion and the lower flange;

wherein the upper portion of each side wall segment is connected to the top wall of the gas inlet manifold; and

wherein the gas distribution plate further comprises

(i) a lip extending radially outward from the perimeter of the gas distribution plate, and

(ii) a plurality of pins attached to, and extending downward from, the lip of the gas distribution plate;

wherein the lower flange of each segment of the side wall includes a plurality of holes;

wherein the lip of the gas distribution plate rests on each lower flange so that each of said pins extends through a corresponding one of said holes; and

wherein each hole has a width that exceeds the width of its corresponding pin so as to permit relative movement between each lower flange and the gas distribution plate.

2. A gas inlet manifold according to claim 1, wherein:

each sheet is flexible so as to permit movement of the lower flange in a direction perpendicular to the sheet; and

for each segment of the side wall, each hole in the lower flange of that segment has a long axis parallel to the sheet of that segment.

3. A gas inlet manifold according to claim 1, wherein:

the width of each hole along one axis of the hole exceeds the width of its corresponding pin along said axis by an amount sufficient to permit an amount of relative movement between each lower flange and the gas distribution plate that exceeds the maximum likely relative differential thermal expansion between the lower flange and the gas distribution plate during operation of the plasma chamber.

4. A gas inlet manifold according to claim 1, wherein:

the width of each hole along one axis of the hole exceeds the width of its corresponding pin along said axis by at least 0.03 inch.

5. A gas inlet manifold according to claim 1, wherein:

the width of each hole along one axis of the hole exceeds the width of its corresponding pin along said axis by at least 0.1% of the widest dimension of the gas distribution plate.

6. A gas inlet manifold according to claim 1, wherein the sheet of each side wall segment is flexible.