Tantalum and niobium billets and methods of producing the same

• US 7,485,198 B2
• Filed: 01/09/2002
• Issued: 02/03/2009
• Est. Priority Date: 01/11/2001
• Status: Expired due to Fees

• Current Assignee: Global Advanced Metals, USA, Inc. (Global Advanced Metals Pty Ltd.)
• Original Assignee: Cabot Corporation
• Inventors: Michaluk, Christopher A.
• Primary Examiner(s): King; Roy
• Assistant Examiner(s): Zheng; Lois L.
• Application Number:
  US10/042,549
• Publication Number:
  US 20020157736A1
• Time in Patent Office: 2,582 Days
• Field of Search: 148/422, 148668-671, 148/DIG.158, 148/DIG.14, 420/425, 420/427, 419/42
• US Class Current: 148/422
• CPC Class Codes: C22C 27/02 Alloys based on vanadium, niobium, or tantalum
• CPC Class Codes: C22F 1/18 High-melting or refractory metals or alloys based thereon
• CPC Class Codes: C23C 14/3414 Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy

Abstract

Extruded tantalum billets and niobium billets are described having a substantially uniform grain size and preferably an average grain size of about 150 microns or less and more preferably an average grain size of about 100 microns or less. The extruded billet can then be forged or processed by other conventional techniques to form end use products such as sputtering targets. A process for making the extruded tantalum billets or niobium billets is also described and involves extruding a starting billet at a sufficient temperature and for a sufficient time to at least partially recrystallize the billet and form the extruded billet of the present invention.

Claims

1. A process for making an extruded tantalum billet, comprising extruding a tantalum ingot having a cylindrical shape having a cross section with a diameter of 6 inches to about 14 inches and having a metal purity of at least 99.99% at a sufficient temperature and for a sufficient time to at least partially recrystallize the tantalum billet during extrusion and form said extruded tantalum billet having a cylindrical shape with an aspect ratio L/D greater than 0.5 with a reduced diameter of 3½

inches or greater and a substantially uniform grain size throughout the cross section of the extruded tantalum billet from said extruding, and said extruded tantalum billet has an average grain size throughout the cross section of the extruded tantalum billet of about 150 microns or less, and said extruded tantalum billet is about 98% or more recrystallized.

2. The process of claim 1, wherein said sufficient temperature is from about 1200°

F. to about 2950°

F.

3. The process of claim 1, wherein said temperature is uniform throughout the extrusion process.

4. The process of claim 1, further comprising the step of water quenching the extruded tantalum billet after extrusion.

5. The process of claim 1, further comprising machine cleaning the extruded tantalum billet.

40. The process of claim 1, further comprising annealing said extruded tantalum billet.

41. The process of claim 40, wherein said annealing occurs at a temperature and for a time sufficient to at least partially recrystallize the extruded tantalum billet during annealing.

42. The process of claim 40, wherein said annealing occurs at a temperature of from about 1742°

F. to about 2102°

F. for about 2 hours.

6. A process for making an extruded tantalum billet, comprising extruding a starting tantalum billet having a cylindrical shape having a cross section with a diameter of 6 inches to about 14 inches and having a metal purity of at least 99.99% at a sufficient temperature and for a sufficient time to at least partially recrystallize the tantalum billet to form said extruded tantalum billet having a cylindrical shape with an aspect ratio L/D greater than 0.5 with a reduced diameter of 3½

inches or greater and a substantially uniform grain size throughout the cross section of the extruded tantalum billet from said extruding, and said extruded tantalum billet has an average grain size throughout the cross section of the extruded tantalum billet of about 150 microns or less, and said extruded tantalum billet is about 98% or more recrystallized.

7. The process of claim 6, wherein said sufficient temperature is from about 1200°

F. to about 2950°

F.

8. The process of claim 6, wherein said temperature is uniform throughout the extrusion process.

9. The process of claim 6, further comprising the step of water quenching the extruded tantalum billet after extrusion.

10. The process of claim 6, further comprising machine cleaning the extruded tantalum billet.

43. The process of claim 6, further comprising annealing said extruded tantalum billet.

44. The process of claim 43, wherein said annealing occurs at a temperature and for a time sufficient to at least partially recrystallize the extruded tantalum billet during annealing.

45. The process of claim 43, wherein said annealing occurs at a temperature of from about 1742°

F. to about 2102°

F. for about 2 hours.

11. A process for making an extruded tantalum billet comprising cutting an ingot into at least one starting billet having a cylindrical shape having a cross section with a diameter of 6 inches to about 14 inches and having a metal purity of at least 99.99% and either applying a protective coating on said starting billet or placing said starting billet in a can;

extruding the starting billet at a sufficient temperature and for a sufficient time to at least partially recrystallize the tantalum billet and to form said extruded tantalum billet having a cylindrical shape with an aspect ratio L/D greater than 0.5 with a reduced diameter of 3½

inches or greater and a substantially uniform grain size throughout the cross section of the extruded tantalum billet from said extruding, and said extruded tantalum billet has an average grain size throughout the cross section of the extruded tantalum billet of about 150 microns or less, and said extruded tantalum billet is about 98% or more recrystallized.

12. The process of claim 11, wherein said sufficient temperature is from about 1200°

F. to about 2950°

F.

13. The process of claim 11, wherein said temperature is uniform throughout the extrusion process.

14. The process of claim 11, further comprising the step of water quenching the extruded tantalum billet after extrusion.

15. The process of claim 11, further comprising machine cleaning the extruded tantalum billet.

16. The process of claim 11, wherein said ingot is obtained by the electron beam melting of a high purity tantalum powder feedstock.

17. The process of claim 11, wherein said protective coating or can is removed after said extruding.

18. The process of claim 17, wherein said protective coating is removed by acid washing or machine cleaning, or both.

46. The process of claim 11, further comprising annealing said extruded tantalum billet.

47. The process of claim 46, wherein said annealing occurs at a temperature and for a time sufficient to at least partially recrystallize the extruded tantalum billet during annealing.

48. The process of claim 46, wherein said annealing occurs at a temperature of from about 1742°

F. to about 2102°

F. for about 2 hours.

19. A process for making an extruded tantalum billet comprising extruding a tantalum ingot having a cylindrical shape having a cross section with a diameter of 6 inches to about 14 inches and having a metal purity of at least 99.99% to form an extruded tantalum billet and then annealing said extruded tantalum billet at a sufficient temperature and for a sufficient time to at least partially recrystallize the extruded tantalum billet and form said extruded tantalum billet having a cylindrical shape with an aspect ratio L/D greater than 0.5 with a reduced diameter of 3½

inches or greater and a substantially uniform grain size throughout the cross section of the extruded tantalum billet from said extruding, and said extruded tantalum billet has an average grain size throughout the cross section of the extruded tantalum billet of about 150 microns or less, and said extruded tantalum billet is about 98% or more recrystallized.

20. A process for making an extruded tantalum billet comprising extruding a starting tantalum billet having a cylindrical shape having a cross section with a diameter of 6 inches to about 14 inches and having a metal purity of at least 99.99% to form said extruded tantalum billet and then annealing said extruded tantalum billet for a sufficient time and for a sufficient temperature to at least partially recrystallize the extruded tantalum billet and form said extruded tantalum billet having a cylindrical shape with an aspect ratio L/D greater than 0.5 with a reduced diameter of 3½

inches or greater and a substantially uniform grain size throughout the cross section of the extruded tantalum billet from said extruding, and said extruded tantalum billet has an average grain size throughout the cross section of the extruded tantalum billet of about 150 microns or less, and said extruded tantalum billet is about 98% or more recrystallized.

21. A process for making an extruded tantalum billet comprising cutting an ingot into at least one starting billet having a cylindrical shape having a cross section with a diameter of 6 inches to about 14 inches and having a metal purity of at least 99.99% and either applying a protective coating on said starting billet or placing said starting billet in a can;

extruding the starting billet to form said extruded tantalum billet and then annealing said extruded tantalum billet at a sufficient temperature and for a sufficient time to at least partially recrystallize the extruded tantalum billet and form said extruded tantalum billet having a cylindrical shape with an aspect ratio L/D greater than 0.5 with a reduced diameter of 3½

inches or greater and a substantially uniform grain size throughout the cross section of the extruded tantalum billet from said extruding, and said extruded tantalum billet has an average grain size throughout the cross section of the extruded tantalum billet of about 150 microns or less, and said extruded tantalum billet is about 98% or more recrystallized.

22. A process for making an extruded niobium billet, comprising extruding a niobium ingot having a cylindrical shape having a cross section with a diameter of 6 inches to about 14 inches and having a metal purity of at least 99.99% to form said extruded niobium billet, wherein said extruding is at a sufficient temperature and for a sufficient time to at least partially recrystallize the niobium billet during extrusion and said extruding forms said extruded niobium billet having a cylindrical shape with an aspect ratio L/D greater than 0.5 with a reduced diameter of 3½

inches or greater and a substantially uniform grain size throughout the cross section of the extruded niobium billet from said extruding, and said extruded niobium billet has an average grain size throughout the cross section of the extruded niobium billet of about 150 microns or less, and said extruded niobium billet is about 98% or more recrystallized.

23. The process of claim 22, wherein said sufficient temperature is from about 1000°

F. to about 2650°

F.

24. The process of claim 22, wherein said temperature is uniform throughout the extrusion process.

25. The process of claim 22, further comprising the step of water quenching the extruded niobium billet after extrusion.

26. The process of claim 22, further comprising machine cleaning the extruded niobium billet.

49. The process of claim 22, further comprising annealing said extruded niobium billet.

50. The process of claim 49, wherein said annealing occurs at a temperature and for a time sufficient to at least partially recrystallize the extruded niobium billet during annealing.

51. The process of claim 49, wherein said annealing occurs at a temperature of from about 1742°

F. to about 2102°

F. for about 2 hours.

27. A process for making an extruded niobium billet, comprising extruding a starting niobium billet having a cylindrical shape having a cross section with a diameter of 6 inches to about 14 inches and having a metal purity of at least 99.99% at a sufficient temperature and for a sufficient time to at least partially recrystallize the niobium billet and form said extruded niobium billet having a cylindrical shape with an aspect ratio L/D greater than 0.5 with a reduced diameter of 3½

inches or greater and a substantially uniform grain size throughout the cross section of the extruded niobium billet from said extruding, and said extruded niobium billet has an average grain size throughout the cross section of the extruded niobium billet of about 150 microns or less, and said extruded niobium billet is about 98% or more recrystallized.

28. The process of claim 27, wherein said sufficient temperature is from about 1000°

F. to about 2650°

F.

29. The process of claim 27, wherein said temperature is uniform throughout the extrusion process.

30. The process of claim 27, further comprising the step of water quenching the extruded niobium billet after extrusion.

31. The process of claim 27, further comprising machine cleaning the extruded niobium billet.

52. The process of claim 27, further comprising annealing said extruded niobium billet.

53. The process of claim 52, wherein said annealing occurs at a temperature and for a time sufficient to at least partially recrystallize the extruded niobium billet during annealing.

54. The process of claim 52, wherein said annealing occurs at a temperature of from about 1742°

F. to about 2102°

F. for about 2 hours.

32. A process for making an extruded niobium billet, comprising cutting an ingot into at least one starting billet having a cylindrical shape having a cross section with a diameter of 6 inches to about 14 inches and having a metal purity of at least 99.99% and either applying a protective coating on said starting billet or placing said starting billet in a can;

extruding the starting billet at a sufficient temperature and for a sufficient time to at least partially recrystallize the niobium billet and form said extruded niobium billet having a cylindrical shape with an aspect ratio L/D greater than 0.5 with a reduced diameter of 3½

inches or greater and a substantially uniform grain size throughout the cross section of the extruded niobium billet from said extruding, and said extruded niobium billet has an average grain size throughout the cross section of the extruded niobium billet of about 150 microns or less, and said extruded niobium billet is about 98% or more recrystallized.

33. The process of claim 32, wherein said sufficient temperature is from about 1000°

F. to about 2650°

F.

34. The process of claim 32, wherein said temperature is uniform throughout the extrusion process.

35. The process of claim 32, further comprising the step of water quenching the extruded niobium billet after extrusion.

36. The process of claim 32, further comprising machine cleaning the extruded niobium billet.

37. The process of claim 32, wherein said ingot is obtained by the electron beam melting of a high purity niobium powder feedstock.

38. The process of claim 32, wherein said protective coating or can is removed after said extruding.

39. The process of claim 38, wherein said protective coating is removed by acid washing or machine cleaning, or both.

55. The process of claim 32, further comprising annealing said extruded niobium billet.

56. The process of claim 55, wherein said annealing occurs at a temperature and for a time sufficient to at least partially recrystallize the extruded niobium billet during annealing.

57. The process of claim 55, wherein said annealing occurs at a temperature of from about 1742°

F. to about 2102°

F. for about 2 hours.

58. A process for making an extruded niobium billet, comprising extruding a niobium ingot having a cylindrical shape having a cross section with a diameter of 6 inches to about 14 inches and having a metal purity of at least 99.99% to form an extruded niobium billet and then annealing said extruded niobium billet at a sufficient temperature and for a sufficient time to at least partially recrystallize the extruded niobium billet and form said extruded niobium billet having a cylindrical shape with an aspect ratio L/D greater than 0.5 with a reduced diameter of 3½

inches or greater and a substantially uniform grain size throughout the cross section of the extruded niobium billet from said extruding, and said extruded niobium billet has an average grain size throughout the cross section of the extruded niobium billet of about 150 microns or less, and said extruded niobium billet is about 98% or more recrystallized.

59. A process for making an extruded niobium billet, comprising extruding a starting niobium billet having a cylindrical shape having a cross section with a diameter of 6 inches to about 14 inches and having a metal purity of at least 99.99% to form said extruded niobium billet and then annealing said extruded niobium billet for a sufficient time and for a sufficient temperature to at least partially recrystallize the extruded niobium billet and form said extruded niobium billet having a cylindrical shape with an aspect ratio L/D greater than 0.5 with a reduced diameter of 3½

inches or greater and a substantially uniform grain size throughout the cross section of the extruded niobium billet from said extruding, and said extruded niobium billet has an average grain size throughout the cross section of the extruded niobium billet of about 150 microns or less, and said extruded niobium billet is about 98% or more recrystallized.

60. A process for making an extruded niobium billet, comprising cutting an ingot into at least one starting billet having a cylindrical shape having a cross section with a diameter of 6 inches to about 14 inches and having a metal purity of at least 99.99% and either applying a protective coating on said starting billet or placing said starting billet in a can;

extruding the starting billet to form said extruded niobium billet and then annealing said extruded niobium billet at a sufficient temperature and for a sufficient time to at least partially recrystallize the extruded niobium billet and form said extruded niobium billet having a cylindrical shape with an aspect ratio L/D greater than 0.5 with a reduced diameter of 3½

inches or greater and a substantially uniform grain size throughout the cross section of the extruded niobium billet from said extruding, and said extruded niobium billet has an average grain size throughout the cross section of the extruded niobium billet of about 150 microns or less, and said extruded niobium billet is about 98% or more recrystallized.