Methods and apparatus for dispensing semiconductor processing solutions with multi-syringe fluid delivery systems
First Claim
1. A method for dispensing a photoresist solution, comprising:
- selecting a coating module within a wafer track system that includes;
a dispense arm to support a gripper for engaging and actuating a fluid syringe;
storing the fluid syringe that contains the photoresist solution within the coating module;
instructing the dispense arm and the gripper to select and removably engage the fluid syringe;
directing the dispense arm with the gripper and the fluid syringe to a predetermined location over a semiconductor wafer;
actuating the fluid syringe to dispense the entire photoresist solution contained therein onto the semiconductor wafer; and
disposing of the fluid syringe.
1 Assignment
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Accused Products
Abstract
Methods and apparatus for controllably dispensing photoresist solutions and other fluids in semiconductor manufacturing equipment from an array of syringe-based fluid dispensers. A multi-syringe fluid dispensing system is provided for photoresist coating within a wafer track coating module. The coating module may contain a spin chuck that is positioned within a catch cup. A robotic dispense arm and gripper assembly may be positioned within the coating module for gripping and positioning a fluid syringe. An array of syringes may be stored on a solution tray within the wafer track coating module for holding a plurality of fluid syringes containing photoresist solutions.
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Citations
3 Claims
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1. A method for dispensing a photoresist solution, comprising:
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selecting a coating module within a wafer track system that includes;
a dispense arm to support a gripper for engaging and actuating a fluid syringe;storing the fluid syringe that contains the photoresist solution within the coating module; instructing the dispense arm and the gripper to select and removably engage the fluid syringe; directing the dispense arm with the gripper and the fluid syringe to a predetermined location over a semiconductor wafer; actuating the fluid syringe to dispense the entire photoresist solution contained therein onto the semiconductor wafer; and disposing of the fluid syringe. - View Dependent Claims (2, 3)
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Specification