Lateral piezoelectric driven highly tunable micro-electromechanical system (MEMS) inductor
First Claim
1. A microelectromechanical system (MEMS) device comprising:
- a substrate;
an anchored end connected to said substrate;
an actuator comprising;
a first electrode;
a piezoelectric layer over said first electrode; and
multiple sets of second electrodes over said piezoelectric layer, wherein each of said sets of second electrodes being defined by a transverse gap there between, and wherein one of said sets of second electrodes are actuated asymmetrically with respect to a first plane resulting in a piezoelectrically induced bending moment arm in a lateral direction that lies in a second plane;
an end effector opposite to said anchored end and connected to said actuator;
a ferromagnetic core support structure connected to said end effector;
a movable ferromagnetic inductor core on top of said ferromagnetic core support structure; and
a MEMS inductor coiled around said ferromagnetic core support structure and said movable ferromagnetic inductor core.
1 Assignment
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Accused Products
Abstract
A MEMS device comprising a substrate; an anchored end connected to the substrate; and an actuator comprising a first electrode; a piezoelectric layer over the first electrode; and multiple sets of second electrodes over the piezoelectric layer, wherein each of the sets of second electrodes being defined by a transverse gap there between, and wherein one of the sets of second electrodes are actuated asymmetrically with respect to a first plane resulting in a piezoelectrically induced bending moment arm in a lateral direction that lies in a second plane. The device further comprises an end effector opposite to the anchored end and connected to the actuator; a ferromagnetic core support structure connected to the end effector; a movable ferromagnetic inductor core on top of the ferromagnetic core support structure; and a MEMS inductor coiled around the ferromagnetic core support structure and the movable ferromagnetic inductor core.
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Citations
20 Claims
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1. A microelectromechanical system (MEMS) device comprising:
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a substrate; an anchored end connected to said substrate; an actuator comprising; a first electrode; a piezoelectric layer over said first electrode; and multiple sets of second electrodes over said piezoelectric layer, wherein each of said sets of second electrodes being defined by a transverse gap there between, and wherein one of said sets of second electrodes are actuated asymmetrically with respect to a first plane resulting in a piezoelectrically induced bending moment arm in a lateral direction that lies in a second plane; an end effector opposite to said anchored end and connected to said actuator; a ferromagnetic core support structure connected to said end effector; a movable ferromagnetic inductor core on top of said ferromagnetic core support structure; and a MEMS inductor coiled around said ferromagnetic core support structure and said movable ferromagnetic inductor core. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A microelectromechanical system (MEMS) device comprising:
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at least one actuation beam comprising; a continuous lower electrode; a piezoelectric layer over said lower electrode; and at least one pair of upper electrodes over said piezoelectric layer; an anchored end connected to said at least one actuation beam; an end effector opposite to said anchored end and connected to said at least one actuation beam; a spring connected to said end effector; a ferromagnetic core support structure connected to said end effector; a movable ferromagnetic inductor core on top of said ferromagnetic core support structure; and a MEMS inductor coiled around said ferromagnetic core support structure and said movable ferromagnetic inductor core. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A microelectromechanical system (MEMS) device having a first end and a second end, said device comprising:
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a sensor comprising; a piezoelectric layer; and multiple electrodes sandwiching said piezoelectric layer, said multiple electrodes comprising a continuous first electrode attached to a first side of said piezoelectric layer and at least one pair of second electrodes attached to a second side of said piezoelectric layer, wherein said pair of second electrodes comprises a primary electrode and a secondary electrode defined by a transverse gap there between; a substrate anchored to said first end; an end effector attached to said second end; a spring member attached to said end effector; an anchored end connected to said sensor; an end effector opposite to said anchored end and connected to said sensor; a ferromagnetic core support structure connected to said end effector; a movable ferromagnetic inductor core on top of said ferromagnetic core support structure; and a MEMS inductor coiled around said ferromagnetic core support structure and said movable ferromagnetic inductor core, wherein said multiple electrodes are adapted to receive voltage, said voltage causing said end effector to laterally deflect in a geometric plane of said substrate.
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Specification