Method and device for multistate interferometric light modulation
First Claim
Patent Images
1. A light modulator, comprising:
- a movable reflector comprising an electrically conductive material, the movable reflector positioned between a first set and a second set of electrodes, the movable reflector being movable between an undriven position, a first driven position, and a second driven position, wherein the first driven position is closer to the first set of electrodes than is the undriven position and wherein the second driven position is farther from the first set of electrodes than is the undriven position;
wherein the first set of electrodes drives the movable reflector to the first driven position;
wherein the second set of electrodes drives the movable reflector to the second driven position; and
further comprisinga third set of electrodes which maintain the movable reflector in the first driven position; and
a fourth set of electrodes which maintain the movable reflector in the second driven position.
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Abstract
A multi-state light modulator comprises a first reflector 104. A first electrode 142 is positioned at a distance from the first reflector 104. A second reflector 14 is positioned between the first reflector 104 and the first electrode 142. The second reflector 14 is movable between an undriven position, a first driven position, and a second driven position, each having a corresponding distance from the first reflector 104. In one embodiment, the light modulator has latch electrodes 17 and 143, which hold the light modulator in a driven state. In another embodiment the latch electrodes 17 and 143 are used to alter the actuation and release thresholds of the light modulator.
335 Citations
20 Claims
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1. A light modulator, comprising:
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a movable reflector comprising an electrically conductive material, the movable reflector positioned between a first set and a second set of electrodes, the movable reflector being movable between an undriven position, a first driven position, and a second driven position, wherein the first driven position is closer to the first set of electrodes than is the undriven position and wherein the second driven position is farther from the first set of electrodes than is the undriven position; wherein the first set of electrodes drives the movable reflector to the first driven position; wherein the second set of electrodes drives the movable reflector to the second driven position; and
further comprisinga third set of electrodes which maintain the movable reflector in the first driven position; and a fourth set of electrodes which maintain the movable reflector in the second driven position. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 16, 17, 18)
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13. A light modulator, comprising:
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means for reflecting light positioned between first and second means for positioning the reflecting means, the reflecting means being movable between an undriven position, a first driven position, and a second driven position, wherein the first driven position is closer to the first positioning means than is the undriven position and wherein the second driven position is farther from the first positioning means than is the undriven position; third means for maintaining the reflecting means in the first driven position; and fourth means for maintaining the reflecting means in the second driven position. - View Dependent Claims (14, 15, 19, 20)
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Specification