Single-crystal-silicon 3D micromirror
First Claim
1. A three-dimensional free space micromirror device comprising:
- single crystal silicon micromirrors wherein each said micromirror comprises a reflecting surface on said single crystal silicon and a dielectric layer therebetween;
single crystal silicon thermal actuators; and
single crystal silicon flexible springs connecting said thermal actuators to said micromirrors wherein said thermal actuators allow said device to achieve a deflection angle of up to 10 degrees.
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Abstract
In a 3D free space micromirror device, a mirror plate is joined with actuators through flexible springs where the other ends of the actuators have fixed support on the substrate. Single crystal silicon and aluminum are used as bi-morph materials with silicon dioxide providing electrical isolation between the two. Thickness variation in the microstructure is achieved by two-step p-n junction formed in a p-type substrate. Thick and thin n-silicon layer formation and DRIE cut mechanisms are employed in such a way that all the thick and thin silicon components of the structure are released simultaneously avoiding overetch which can be detrimental to the thin flexural springs. Working prototypes of the device have been found suitable for any optical switching array architecture where deflections up to 10 degrees are required.
8 Citations
26 Claims
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1. A three-dimensional free space micromirror device comprising:
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single crystal silicon micromirrors wherein each said micromirror comprises a reflecting surface on said single crystal silicon and a dielectric layer therebetween; single crystal silicon thermal actuators; and single crystal silicon flexible springs connecting said thermal actuators to said micromirrors wherein said thermal actuators allow said device to achieve a deflection angle of up to 10 degrees. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A three-dimensional free space micromirror device comprising mirror elements wherein each mirror element comprises:
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one single crystal silicon micromirror wherein said micromirror comprises a reflecting surface on said single crystal silicon and a dielectric layer therebetween; a single crystal silicon flexible spring at each of four corners of said micromirror; and four single crystal silicon thermal actuators, one joined to said micromirror through each of said flexible springs; and fixed supports on a substrate attached to each of said thermal actuators wherein said thermal actuators allow said device to achieve a deflection angle of up to 10 degrees. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17)
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18. A three-dimensional free space micromirror device comprising mirror elements wherein each mirror element comprises:
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one single crystal silicon micromirror; a single crystal silicon flexible spring at each of four corners of said micromirror; and four single crystal silicon thermal actuators, one joined to said micromirror through each of said flexible springs; and a bond pad on each of said thermal actuators wherein said thermal actuators are attached to fixed supports on a substrate through said bond pads. - View Dependent Claims (19, 20, 21, 24, 25, 26)
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- 22. The device according to claim wherein said thermal actuators have a length of between about 300 and 500 microns, a silicon thickness of about 2 microns, a silicon dioxide thickness of 0.2 microns, and an aluminum thickness of about 1 micron.
Specification