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Sensor having free fall self-test capability and method therefor

  • US 7,487,661 B2
  • Filed: 10/11/2006
  • Issued: 02/10/2009
  • Est. Priority Date: 10/11/2006
  • Status: Expired due to Fees
First Claim
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1. A device comprising:

  • a transducer, the transducer comprising;

    a movable element;

    a self-test actuator disposed proximate said movable element for providing an electrostatic force to move said movable element from a negative gravitational position to a neutral gravitational position, said neutral gravitational position simulating free fall; and

    a sensing element disposed beneath said movable element, said sensing element being adapted to detect movement of said movable element from said negative gravitational position to said neutral gravitational position along an axis perpendicular to a plane of said sensing element.

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