Sensor having free fall self-test capability and method therefor

• US 7,487,661 B2
• Filed: 10/11/2006
• Issued: 02/10/2009
• Est. Priority Date: 10/11/2006
• Status: Expired due to Fees

• Current Assignee: North Star Innovations Inc. (Wi-LAN Inc.)
• Original Assignee: Freescale Semiconductor, Inc. (NXP Semiconductors NV)
• Inventors: McNeil, Andrew C., Ueda, Akihiro
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US11/580,419
• Publication Number:
  US 20080087085A1
• Time in Patent Office: 853 Days
• Field of Search: 73/13.8, 73/13.9, 735/143.2, 360/75
• US Class Current: 73/1.39
• CPC Class Codes: G01P 15/0891 with indication of predetermined acceleration values G01P15/135 takes precedence
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: G01P 2015/082 for two degrees of freedom of movement of a single mass
• CPC Class Codes: G01P 2015/0831 the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
• CPC Class Codes: G01P 21/00 Testing or calibrating of apparatus or devices covered by the preceding groups
• CPC Class Codes: G11B 19/043 by detecting a free-fall condition

Abstract

A transducer (20) includes a movable element (24), a self-test actuator (22), and a sensing element (56, 58). The sensing element (56, 58) detects movement of the movable element (24) from a first position (96) to a second position (102) along an axis perpendicular to a plane of the sensing element (56, 58). The second position (102) results in an output signal (82) that simulates a free fall condition. A method (92) for testing a protection feature of a device (70) having the transducer (20) entails moving the movable element (24) to the first position (102) to produce a negative gravitational force detectable at the sensing element (56, 68), applying a signal (88) to the actuator (22) to move the movable element (24) to the second position (102) by the electrostatic force (100) , and ascertaining an enablement of the protection feature in response to the simulated free fall.

Claims

1. A device comprising:

a transducer, the transducer comprising;

a movable element;

a self-test actuator disposed proximate said movable element for providing an electrostatic force to move said movable element from a negative gravitational position to a neutral gravitational position, said neutral gravitational position simulating free fall; and

a sensing element disposed beneath said movable element, said sensing element being adapted to detect movement of said movable element from said negative gravitational position to said neutral gravitational position along an axis perpendicular to a plane of said sensing element.

2. A device as claimed in claim 1 wherein said electrostatic force has a magnitude corresponding to an acceleration due to gravity.

3. A device as claimed in claim 1 wherein said sensing element comprises a capacitive plate adapted to sense acceleration along said axis.

4. A device as claimed in claim 1 wherein said axis is a first axis, and said movable element comprises first and second sets of fingers adapted to sense acceleration along second and third mutually orthogonal axes, said second and third axes being orthogonal to said first axis.

5. A device as claimed in claim 1 wherein said transducer further comprises a substrate, and said self-test actuator is supported on said substrate beneath said movable element.

6. A device as claimed in claim 1 wherein said sensing element is a first sensing element, and said transducer further comprises a second sensing element disposed beneath said movable element, said first and second sensing elements functioning to detect said movement of said movable element.

7. A device as claimed in claim 6 wherein said transducer further comprises a substrate, said movable element is mounted on said substrate, said first and second sensing elements are supported by said substrate beneath said movable element, and said first and second sensing elements are disposed in an arrangement that has a line of mirror symmetry.

8. A device as claimed in claim 7 wherein said first sensing element is offset a first distance from said line of symmetry, and said self-test actuator is supported by said substrate beneath said movable element, said self-test actuator being offset a second distance from said line of symmetry, said second distance being greater than said first distance.

9. A device as claimed in claim 1 wherein said transducer further comprises a substrate, said movable element is mounted on said substrate and said sensing element is disposed beneath a center location of said movable element.

10. A device as claimed in claim 9 wherein said self-test actuator comprises first and second portions that are symmetrically disposed on said substrate about said center location.

11. A method for testing a protection feature of a device having a transducer adapted to sense free fall, said transducer including a movable element, a self-test actuator disposed proximate said movable element, and a sensing element disposed beneath said movable element, said method comprising:

moving said movable element to a first position, said first position producing a negative gravitational force detectable at said sensing element;

applying a self-test signal to said self-test actuator to move said movable element to a second position by electrostatic force, said second position simulating said free fall; and

ascertaining an enablement of said protection feature in response to said simulated free fall.

12. A method as claimed in claim 11 further comprising sensing, at said sensing element, acceleration due to gravity along an axis perpendicular to a plane of said sensing element in response to said applying operation.

13. A method as claimed in claim 12 wherein said axis is a first axis, said movable element includes a first set of fingers aligned along a second axis and a second set of fingers aligned along a third axis, said first, second, and third axes being mutually orthogonal, and said method further comprises sensing acceleration along said second and third axes.

14. A method as claimed in claim 11 further comprising:

outputting from said transducer a signal corresponding to said second position;

detecting said signal at said device; and

verifying said enablement of said protection feature of said device in response to detection of said signal.