Monolithic inkjet printhead with high nozzle count
First Claim
Patent Images
1. An inkjet printhead comprising:
- a monolithic wafer substrate with a planar surface supporting more than 5000 drop ejection apparati, each drop ejection apparati having a chamber, an actuator and a nozzle respectively, the nozzles are all formed in a nozzle wall defining an array of apertures that are coplanar and parallel to the planar surface, and the chambers each have at least one side wall extending from the nozzle wall toward the planar surface of the monolithic wafer substrate;
wherein,the nozzle wall and all the at least one side walls are intergrally formed.
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Abstract
Inkjet printheads with very large numbers of nozzles are disclosed. Various structures are shown where the number of nozzles fabricated on a single printhead chip is as high as 19,200.
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Citations
5 Claims
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1. An inkjet printhead comprising:
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a monolithic wafer substrate with a planar surface supporting more than 5000 drop ejection apparati, each drop ejection apparati having a chamber, an actuator and a nozzle respectively, the nozzles are all formed in a nozzle wall defining an array of apertures that are coplanar and parallel to the planar surface, and the chambers each have at least one side wall extending from the nozzle wall toward the planar surface of the monolithic wafer substrate;
wherein,the nozzle wall and all the at least one side walls are intergrally formed. - View Dependent Claims (2, 3, 4, 5)
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Specification