Ion source including magnet and magnet yoke assembly

• US 7,488,951 B2
• Filed: 08/24/2006
• Issued: 02/10/2009
• Est. Priority Date: 08/24/2006
• Status: Expired due to Fees

• Current Assignee: Guardian Glass LLC (KOCH Industries Incorporated)
• Original Assignee: Guardian Industries Corporation (KOCH Industries Incorporated)
• Inventors: Rock, David E., Murphy, Nestor P.
• Primary Examiner(s): NGUYEN, KIET TUAN
• Application Number:
  US11/509,076
• Publication Number:
  US 20080048127A1
• Time in Patent Office: 901 Days
• Field of Search: 250/423.R, 250/426, 250/427
• US Class Current: 250/423.00R
• CPC Class Codes: H01F 7/0205 Magnetic circuits with PM in general
• CPC Class Codes: H01F 7/0278 for generating uniform fields, focusing, deflecting electrically charged particles for magnetic separation by Lorentz force B03C1/023; specially adapted for NMR applications G01R33/383
• CPC Class Codes: H01J 2237/061 Construction
• CPC Class Codes: H01J 2237/3142 Ion plating
• CPC Class Codes: H01J 2237/3151 Etching
• CPC Class Codes: H01J 27/143 Hall-effect ion sources with closed electron drift
• CPC Class Codes: H01J 37/08 Ion sources; Ion guns

Abstract

An ion source is provided which is capable of generating and/or emitting an ion beam which may be used to deposit a layer on a substrate or to perform other functions. In certain example embodiments, a magnet yoke assembly used in the ion source is provided, and the magnet yoke assembly includes a lower yoke and an upper yoke. At least one magnet is disposed between the lower yoke and the upper yoke, with the at least one magnet having a substantially rectangular shape in certain example embodiments. The at least one magnet may be adhered to the lower yoke and/or the upper yoke.

Claims

1. A magnet yoke assembly for use in an ion source, comprising:

a lower yoke and an upper yoke; and

,

at least one magnet disposed between the lower yoke and the upper yoke, the at least one magnet having a substantially rectangular shape;

wherein the at least one magnet is adhered to the lower yoke and/or the upper yoke;

at least two fastener holes formed in each of the lower yoke and the upper yoke; and

a plate aligned with each fastener hole, each plate being supported on a magnet-facing surface of the lower yoke and/or upper yoke;

wherein the fastener holes and the plates are configured to receive fasteners for attaching the upper and lower yokes to one another.

2. The magnet yoke assembly of claim 1, wherein at least three magnets are disposed between the lower yoke and the upper yoke.

3. The magnet yoke assembly of claim 1, wherein each plate on the lower yoke and each fastener hole on the lower yoke is threaded.

4. The magnet yoke assembly of claim 1, wherein a plurality of plates on the lower yoke protrude therefrom forming protrusions and recessions, and wherein at least one magnet is located in each recession.

5. The magnet yoke assembly of claim 1, wherein the upper and lower yokes are substantially parallel to each other.

6. The magnet yoke assembly of claim 1, wherein the upper and/or lower yoke(s) are made of steel.

7. A magnet yoke assembly for use in an ion source, comprising:

a lower yoke and an upper yoke; and

,

at least one magnet disposed between the lower yoke and the upper yoke, the at least one magnet having a substantially rectangular shape;

wherein the at least one magnet is adhered to the lower yoke and/or the upper yoke; and

wherein the magnet has a length which is at least twice as large as its width.

8. An ion source capable of emitting an ion beam, comprising:

an anode and a cathode, one of the anode and cathode having a discharge gap defined therein;

a power supply in electrical communication with the anode and/or the cathode; and

,

at least one magnet yoke assembly operable to generate a magnetic field proximate to the discharge gap, the at least one magnet yoke assembly comprising;

a lower yoke and an upper yoke; and

,

at least one magnet disposed between the lower yoke and the upper yoke, the at least one magnet having a substantially rectangular shape;

wherein the at least one magnet is adhered to the lower yoke and/or the upper yoke, and wherein the magnet has a length which is at least twice as large as its width.

9. The ion source of claim 8, wherein the at least one magnet yoke assembly includes at least three magnets disposed between the upper and lower yokes.

10. The ion source of claim 8, wherein the upper and lower yokes are substantially parallel to each other.

11. An ion source capable of emitting an ion beam, comprising:

an anode and a cathode, one of the anode and cathode having a discharge gap defined therein;

a power supply in electrical communication with the anode and/or the cathode; and

,

at least one magnet yoke assembly operable to generate a magnetic field proximate to the discharge gap, the at least one magnet yoke assembly comprising;

a lower yoke and an upper yoke; and

,

at least one magnet disposed between the lower yoke and the upper yoke, the at least one magnet having a substantially rectangular shape;

wherein the at least one magnet is adhered to the lower yoke and/or the upper yoke;

wherein the magnet yoke assembly further comprises;

at least two screw holes formed in each of the lower yoke and the upper yoke; and

,

a screw plate aligned with each screw hole, each screw plate having an screw-receiving aperture defined therein and being disposed on a magnet-facing surface of the lower yoke and/or upper yoke;

wherein the screw holes and the screw plates are configured to receive fasteners.

12. The ion source of claim 11, wherein each screw plate on the lower yoke and each screw hole on the lower yoke is threaded.

13. The ion source of claim 11, wherein a plurality of screw plates on the lower yoke protrude therefrom forming protrusions and recessions.

14. The ion source of claim 13, wherein the at least one magnet is disposed in each of the recessions.

15. The ion source of claim 11, wherein at least one of the fasteners is configured to be turned to cause the at least one magnet yoke assembly to separate from the ion source.

16. A method of making an ion source, the method comprising:

providing a lower yoke and an upper yoke;

positioning at least one substantially rectangular-shaped magnet between the upper yoke and the lower yoke;

adhering the at least one magnet to the upper yoke and/or the lower yoke to form a magnet yoke assembly;

positioning the magnet yoke assembly in an ion source so that the magnet yoke assembly is substantially surrounded by the anode and/or cathode of the ion source as viewed from above; and

bolting together the upper yoke and the lower yoke using at least two screw holes formed in the lower yoke and at least two screw holes formed in the upper yoke, the at least two screw holes of the lower yoke and the at least two screw holes of the upper yoke being aligned.

17. The method of claim 16 further comprising removing the bolts, and after removing the bolts inserting the magnet yoke assembly in the ion source.

18. The method of claim 16, wherein the magnet yoke assembly is positioned in the ion source so that a bottom of an inner cathode of the ion source rests on a top surface of the upper yoke of the magnet yoke assembly.

19. An ion source capable of emitting an ion beam, comprising:

an anode and a cathode, one of the anode and cathode having a discharge gap defined therein;

a power supply in electrical communication with the anode and/or the cathode; and

,

at least one magnet yoke assembly operable to generate a magnetic field proximate to the discharge gap, the at least one magnet yoke assembly comprising;

a lower yoke and an upper yoke; and

,

at least one magnet disposed between the lower yoke and the upper yoke;

wherein the magnet has a length which is at least twice as large as its width and/or height.

20. The ion source of claim 19, wherein the at least one magnet has a rectangular prism shape.

21. The ion source of claim 19, wherein the at least one magnet is adhered to the lower yoke and/or the upper yoke via a layer of adhesive.

22. The ion source of claim 19, wherein the magnet has a length which is at least three times as large as its width and/or height.