Area array modulation and lead reduction in interferometric modulators

• US 7,489,428 B2
• Filed: 01/03/2007
• Issued: 02/10/2009
• Est. Priority Date: 12/09/2003
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: IDC, LLC
• Inventors: Sampsell, Jeffrey Brian, Chui, Clarence, Kothari, Manish
• Primary Examiner(s): Choi; William C
• Application Number:
  US11/649,439
• Publication Number:
  US 20070291347A1
• Time in Patent Office: 769 Days
• Field of Search: 359/198, 359/223, 359/224, 359/247, 359/290, 359/291, 359/302
• US Class Current: 359/198.1
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G09G 2300/06 Passive matrix structure, i.e. with direct application of both column and row voltages to the light emitting or modulating elements, other than LCD or OLED
• CPC Class Codes: G09G 2310/0267 Details of drivers for scan electrodes, other than drivers for liquid crystal, plasma or OLED displays
• CPC Class Codes: G09G 2310/0297 Special arrangements with multiplexing or demultiplexing of display data in the drivers for data electrodes, in a pre-processing circuitry delivering display data to said drivers or in the matrix panel, e.g. multiplexing plural data signals to one D/A converter or demultiplexing the D/A converter output to multiple columns
• CPC Class Codes: G09G 3/2074 using sub-pixels
• CPC Class Codes: G09G 3/2081 with combination of amplitude modulation and time modulation space and time error diffusion G09G3/2066
• CPC Class Codes: G09G 3/3466 based on interferometric effect

Abstract

A light modulator is arranged as an array of rows and columns of interferometric display elements. Each element is divided into sub-rows of sub-elements. Array connection lines transmit operating signals to the display elements, with one connection line corresponding to one row of display elements in the array. Sub-array connection lines electrically connect to each array connection line. Switches transmit the operating signals from each array connection line to the sub-rows to effect gray scale modulation.

Claims

1. A MEMS device, comprising:

a plurality of elements having differing values of at least one of a time-based activation threshold for a select voltage and a voltage-based activation threshold for a select time; and

addressing lines configured to provide signals of at least one of selectable voltage and selectable time to the elements such that different numbers of elements activate in a selectable manner, according to the voltage and time of the signals.

2. The device of claim 1, wherein the addressing lines are configured to provide one signal for a row in the plurality of elements.

3. The device of claim 1, wherein the elements are bi-stable.

4. The device of claim 1, wherein the elements are light modulators.

5. The device of claim 1, wherein the elements comprise differing mechanical structures so as to effect differing values of at least one of activation versus time and activation versus voltage.

6. The device of claim 5, wherein the elements comprise at least one of differing mechanical support structure, differing film thicknesses, and residual stress.

7. The device of claim 1, wherein the elements have differing areas.

8. The device of cxlaim 1, wherein the elements share the same signals from the addressing lines.

9. A MEMS device, comprising:

a plurality of elements having differing values of at least one of a time-based activation threshold for a select voltage and a voltage-based activation threshold for a select time; and

means for providing signals of at least one of varying voltage and varying time to the elements such that different numbers of elements activate in a selectable manner, according to the voltage and time of the signals.

10. The device of claim 9, wherein the providing means comprises addressing lines.

11. The device of claim 9, wherein the elements are light modulators.

12. The device of claim 9, wherein the elements comprise differing mechanical structures so as to effect differing values of at least one of activation versus time and activation versus voltage.

13. The device of claim 9, wherein the elements comprise at least one of differing mechanical support structure, differing film thicknesses, differing area and differing residual stress.

14. The device of claim 9, wherein the elements share the same signals from the providing means.

15. A method of manufacturing a MEMS device, the method comprising:

forming a plurality of elements having differing values of at least one of a time-based activation threshold for a select voltage and a voltage-based activation threshold for a select time; and

connecting addressing lines to the plurality of elements, wherein the addressing lines are configured to provide signals of at least one of selectable voltage and selectable time to the elements such that different numbers of elements activate in a selectable manner, according to the voltage and time of the signals.

16. The method of claim 15, wherein the addressing lines are configured to provide one signal for a row in the plurality of elements.

17. The method of claim 15, wherein the elements are bi-stable.

18. The method of claim 15, wherein the elements are light modulators.

19. The method of claim 15, further comprising forming elements of differing mechanical structures so as to effect differing values of at least one of activation versus time and activation versus voltage.

20. The method of claim 19, further comprising forming elements comprising at least one of differing mechanical support structure, differing film thicknesses, differing area and differing residual stress.

21. The method of claim 15, wherein the addressing lines are connected to the elements such that the elements share the same signals from the addressing lines.