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Transportable container including an internal environment monitor

  • US 7,490,637 B2
  • Filed: 01/03/2007
  • Issued: 02/17/2009
  • Est. Priority Date: 01/10/2001
  • Status: Expired due to Term
First Claim
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1. A SMIF pod having an internal environment isolated from ambient atmospheric conditions, the SMIF pod comprising:

  • a shell portion having one of a bottom opening and a front opening;

    a door to sealing close the one of the bottom opening and the front opening;

    one of a plurality of wafer shelves mounted within the shell portion to receive a plurality of wafers horizontally and a wafer cassette seatable on the door, the wafer cassette configured to receive a plurality of wafers horizontally, the wafers received intermediate processing steps for manufacturing the wafers into semiconductors;

    a plurality of sensors, each sensor monitoring an internal environmental condition within said SMIF pod;

    a transceiver in communication with said plurality of sensors, receiving and transmitting said data transmitted by said plurality of sensors; and

    a power supply, providing power to said at least one sensor and said transceiver.

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