MEMS device packaging methods
First Claim
1. A method of packaging a MEMS device, comprising the steps of:
- providing a MEMS die having a MEMS device substantially enclosed within a support structure, wherein the MEMS die has bond pads disposed thereon;
providing a MEMS package having a recess and bond pads disposed adjacent to the recess;
positioning the MEMS die over the MEMS package;
aligning the support structure substantially enclosing the MEMS device of the MEMS die with the recess of the MEMS package, and aligning at least some of the bond pads of the MEMS die with at least some of the bond pads of the MEMS package;
inserting the MEMS die and MEMS package into a chamber and producing a controlled environment therein; and
sealing the MEMS die and MEMS package together along a ring to form a package having a hermetically sealed interior chamber that includes the support structure substantially enclosing the MEMS device, as well as forming electrical connections between selected bond pads of the MEMS die with selected bond pads of the MEMS package.
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Accused Products
Abstract
A method of packaging a MEMS device that includes, for example, the steps of providing a MEMS die that has a MEMS device, a seal ring and bond pads disposed thereon, providing a MEMS package that has a recess, a seal ring and bond pads disposed thereon, positioning the MEMS die over the MEMS package to align the seal rings and bond pads, inserting the MEMS die and MEMS package into a vacuum chamber and evacuating gasses therefrom to form a controlled vacuum pressure therein, sealing the MEMS package and the MEMS die together at the seal rings to form a package having a hermitically sealed interior chamber and simultaneously forming electrical connections between the corresponding bond pads.
127 Citations
28 Claims
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1. A method of packaging a MEMS device, comprising the steps of:
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providing a MEMS die having a MEMS device substantially enclosed within a support structure, wherein the MEMS die has bond pads disposed thereon; providing a MEMS package having a recess and bond pads disposed adjacent to the recess; positioning the MEMS die over the MEMS package; aligning the support structure substantially enclosing the MEMS device of the MEMS die with the recess of the MEMS package, and aligning at least some of the bond pads of the MEMS die with at least some of the bond pads of the MEMS package; inserting the MEMS die and MEMS package into a chamber and producing a controlled environment therein; and sealing the MEMS die and MEMS package together along a ring to form a package having a hermetically sealed interior chamber that includes the support structure substantially enclosing the MEMS device, as well as forming electrical connections between selected bond pads of the MEMS die with selected bond pads of the MEMS package. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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Specification