Semiconductor device and manufacturing method of semiconductor device
First Claim
1. A semiconductor device including ESD protective circuits for enhancing a tolerance to an electrostatic discharge breakdown, comprising:
- a substrate of a first conductive type,a first region forming a plurality of first ESD protective circuits in a finger structure, anda second region forming a plurality of second ESD protective circuits in the finger structure,wherein each of the first ESD protective circuits includes;
a first transistor having a first gate electrode, and a first drain electrode including a first diffusion region of a second conductive type, anda first ballast resistance including a second diffusion region of the second conductive type connected to the first diffusion region in a direction apart from the first gate electrode, with an impurity concentration lower than the concentration of the first diffusion region, andeach of the second ESD protective circuits includes;
a second transistor having a second gate electrode, and a second drain electrode including a third diffusion region of the second conductive type, having dielectric strength of a gate oxide lower than that of the first transistor, anda second ballast resistance including a fourth diffusion region of the second conductive type connected to the third diffusion region in a direction apart from the second gate electrode, with the impurity concentration higher than the concentration of the second diffusion region.
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Accused Products
Abstract
To present a semiconductor device mounting ESD protective device appropriately applicable to transistors mutually different in dielectric strength, and its manufacturing method. The semiconductor device comprises a first ESD protective circuit 1A including a first transistor 3 and a first ballast resistance 4, and a second ESD protective circuit 1B including a second transistor 5 and a second ballast resistance 6. The impurity concentration of the second diffusion region forming the first ballast resistance 4 is set lower than the impurity concentration of the fourth diffusion region for forming the second ballast resistance 6.
11 Citations
7 Claims
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1. A semiconductor device including ESD protective circuits for enhancing a tolerance to an electrostatic discharge breakdown, comprising:
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a substrate of a first conductive type, a first region forming a plurality of first ESD protective circuits in a finger structure, and a second region forming a plurality of second ESD protective circuits in the finger structure, wherein each of the first ESD protective circuits includes; a first transistor having a first gate electrode, and a first drain electrode including a first diffusion region of a second conductive type, and a first ballast resistance including a second diffusion region of the second conductive type connected to the first diffusion region in a direction apart from the first gate electrode, with an impurity concentration lower than the concentration of the first diffusion region, and each of the second ESD protective circuits includes; a second transistor having a second gate electrode, and a second drain electrode including a third diffusion region of the second conductive type, having dielectric strength of a gate oxide lower than that of the first transistor, and a second ballast resistance including a fourth diffusion region of the second conductive type connected to the third diffusion region in a direction apart from the second gate electrode, with the impurity concentration higher than the concentration of the second diffusion region. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification