Chuck for holding a device under test
First Claim
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1. A probe station for probing a device under test having a probing surface, said probe station comprising:
- (a) a chuck having an upper surface suitable to support said device under test, and at least one probe suitable to probe said device under test while said probing surface is facing away from said upper surface;
(b) a conductive element electrically isolated from said upper surface of said chuck and extending through said chuck to said upper surface of said chuck; and
(c) said conductive element positioned so as to electrically contact said device under test when said device under test is being probed by said at least one probe and while said probing surface is facing away from said upper surface;
(d) said conductive element is electrically interconnected to the edge of said chuck.
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Accused Products
Abstract
A chuck that includes an upper surface for supporting a device under test and a conductive element that extends through the chuck to the upper surface of the chuck. The conductive element is electrically isolated from the upper surface of the chuck, and makes electrical contact with any device under test supported by the chuck.
870 Citations
6 Claims
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1. A probe station for probing a device under test having a probing surface, said probe station comprising:
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(a) a chuck having an upper surface suitable to support said device under test, and at least one probe suitable to probe said device under test while said probing surface is facing away from said upper surface; (b) a conductive element electrically isolated from said upper surface of said chuck and extending through said chuck to said upper surface of said chuck; and (c) said conductive element positioned so as to electrically contact said device under test when said device under test is being probed by said at least one probe and while said probing surface is facing away from said upper surface; (d) said conductive element is electrically interconnected to the edge of said chuck. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification