Membrane probing system

• US 7,492,175 B2
• Filed: 01/10/2008
• Issued: 02/17/2009
• Est. Priority Date: 08/21/2001
• Status: Expired due to Fees

• Current Assignee: FormFactor Beaverton, Inc. (FormFactor Incorporated)
• Original Assignee: Cascade Microtech Incorporated (FormFactor Incorporated)
• Inventors: Smith, Kenneth, Gleason, Reed
• Primary Examiner(s): Nguyen; Ha Tran T
• Assistant Examiner(s): Chan; Emily Y
• Application Number:
  US12/008,594
• Publication Number:
  US 20080111571A1
• Time in Patent Office: 404 Days
• Field of Search: 324754-765
• US Class Current: 324/755.09
• CPC Class Codes: G01R 1/0735 arranged on a flexible frame or film

Abstract

A membrane probing assembly includes a probe card with conductors supported thereon, wherein the conductors include at least a signal conductor located between a pair of spaced apart guard conductors. A membrane assembly includes a membrane with contacts thereon, and supporting at least a signal conductor located between a pair of spaced apart guard conductors. The guard conductors of the probe card are electrically interconnected proximate the interconnection between the probe card and the membrane assembly. The guard conductors of the membrane assembly are electrically interconnected proximate the interconnection between the probe card and the membrane assembly.

Claims

1. A probing assembly for probing an electrical device comprising:

(a) a support;

(b) a membrane in overlying relationship to said support;

(c) a first elongate conductor supported by said membrane;

(d) a first contact supported by said membrane, said contact electrically connected to said first elongate conductor and having a first contact thickness measured perpendicularly from said membrane to the outermost point on a contacting surface of said first contact;

(e) a pair of additional conductors supported by said membrane, where said first elongate conductor is located between said pair of additional conductors;

(f) said pair of additional conductors are electrically interconnected together in a manner extending substantially around an end of said first elongate conductor; and

(g) a second contact electrically connected to a second elongate conductor and having a second contact thickness measured perpendicularly from said membrane to the outermost point on a contacting surface of said second contact, where said second contact thickness is different from said first contact thickness.

2. The probing assembly of claim 1 wherein said first elongate conductor and said pair of additional conductors are on the same plane.

3. The probing assembly of claim 1 wherein said pair of additional conductors are non-symmetrical with respect to said first conductor.

4. The probing assembly of claim 1 wherein said pair of additional conductors have different widths proximate said end of said first conductor.

5. The probing assembly of claim 1 further comprising a second elongate conductor supported by said membrane and said second elongate conductor is located between said pair of additional conductors.

6. The probing assembly of claim 5 wherein said first conductor is a force connection and said second conductor is a sense connection.