Microfabricated elastomeric valve and pump systems
First Claim
1. A method of microfabricating an elastomeric structure, comprising:
- microfabricating a first elastomeric layer, wherein the first elastomeric layer is fabricated on a first micromachined mold having at least one raised protrusion which forms at least one recess in the bottom of the first elastomeric layer;
microfabricating a second elastomeric layer, wherein the second elastomeric layer is fabricated on a second micromachined mold having at least one raised protrusion which forms at least one recess in the bottom of the second elastomeric layer;
positioning the second elastomeric layer on top of the first elastomeric layer such that at least one recess in the second layer substantially perpendicularly passes over at least one recess in the first layer; and
bonding a bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer.
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Accused Products
Abstract
A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
144 Citations
12 Claims
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1. A method of microfabricating an elastomeric structure, comprising:
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microfabricating a first elastomeric layer, wherein the first elastomeric layer is fabricated on a first micromachined mold having at least one raised protrusion which forms at least one recess in the bottom of the first elastomeric layer; microfabricating a second elastomeric layer, wherein the second elastomeric layer is fabricated on a second micromachined mold having at least one raised protrusion which forms at least one recess in the bottom of the second elastomeric layer; positioning the second elastomeric layer on top of the first elastomeric layer such that at least one recess in the second layer substantially perpendicularly passes over at least one recess in the first layer; and bonding a bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification