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Layered barrier structure having one or more definable layers and method

  • US 7,494,742 B2
  • Filed: 01/06/2005
  • Issued: 02/24/2009
  • Est. Priority Date: 01/06/2004
  • Status: Expired due to Fees
First Claim
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1. An apparatus comprising:

  • a substrate;

    a first device attached to the substrate; and

    a layered barrier structure that has a plurality of layers and that seals the first device, wherein the layered barrier structure includes a first physical-configuration layer made of a photodefinable material having a definable lateral extent that is photodefined after being deposited, and wherein at least one of the layers provides at least one of a smoothing, planarizing, and leveling physical- configuration function, and wherein the layered barrier structure includes a first barrier layer deposited on the first physical configuration layer.

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