Layered barrier structure having one or more definable layers and method
First Claim
1. An apparatus comprising:
- a substrate;
a first device attached to the substrate; and
a layered barrier structure that has a plurality of layers and that seals the first device, wherein the layered barrier structure includes a first physical-configuration layer made of a photodefinable material having a definable lateral extent that is photodefined after being deposited, and wherein at least one of the layers provides at least one of a smoothing, planarizing, and leveling physical- configuration function, and wherein the layered barrier structure includes a first barrier layer deposited on the first physical configuration layer.
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Abstract
A system provides an environmental barrier also useful for providing a circuit, for example, one having a thin-film battery such as one that includes lithium or lithium compounds connected to an electronic circuit. An environmental barrier is deposited as alternating layers, at least one of the layers providing a smoothing, planarizing, and/or leveling physical-configuration function, and at least one other layer providing a diffusion-barrier function. The layer providing the physical-configuration function may include a photoresist, a photodefinable, an energy-definable, and/or a maskable layer. The physical-configuration layer may also be a dielectric. A layered structure, including a plurality of pairs of layers, each pair including a physical configuration layer and a barrier layer with low gas-transmission rates, may be used in reducing gas transmission rate to beyond currently detectable levels.
231 Citations
77 Claims
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1. An apparatus comprising:
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a substrate; a first device attached to the substrate; and a layered barrier structure that has a plurality of layers and that seals the first device, wherein the layered barrier structure includes a first physical-configuration layer made of a photodefinable material having a definable lateral extent that is photodefined after being deposited, and wherein at least one of the layers provides at least one of a smoothing, planarizing, and leveling physical- configuration function, and wherein the layered barrier structure includes a first barrier layer deposited on the first physical configuration layer. - View Dependent Claims (4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40)
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2. An apparatus comprising:
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a substrate; a first device attached to the substrate; and a layered barrier structure that seals the first device, wherein the layered barrier structure includes a first physical-configuration layer made of a photodefinable material having a definable lateral extent, and wherein the layered barrier structure includes a first barrier layer, wherein the first physical-configuration layer has a lateral extent that is photodefinable. - View Dependent Claims (3)
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41. An apparatus comprising:
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a substrate; a first device attached to the substrate; and means for sealing the first device, including means for physically configuring a surface of the device, the means for physically configuring the surface of the device made of a photodefinable material having a definable lateral extent that is photodefined after being deposited, and provides at least one of smoothing, planarizing and leveling physical configuration function, that is, and means for blocking gas, deposited on the means for physically configuring the surface of the device. - View Dependent Claims (42, 43, 44, 45, 46, 47, 48, 49, 50)
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51. A method comprising:
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providing a substrate having a first device attached to the substrate; and forming a first layered barrier structure that seals the first device, wherein the forming of the layered barrier structure includes depositing a first physical-configuration layer made of a photodefinable material having a definable lateral extent, wherein the first physical-configuration layer provides at least one of a smoothing, planarizing, and leveling physical-configuration function, photodefining the first physical-configuration layer after it is deposited, and depositing a first barrier layer on the first physical-configuration layer. - View Dependent Claims (52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77)
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Specification