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Methods and apparatus for pixilated detector masking

  • US 7,495,225 B2
  • Filed: 12/08/2004
  • Issued: 02/24/2009
  • Est. Priority Date: 12/08/2004
  • Status: Active Grant
First Claim
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1. A method of detecting ionizing radiation utilizing a pixelated semiconductor substrate such that each pixel comprises a central region and a region of variable response, said method comprising:

  • substantially blocking the ionizing radiation from reaching the region of variable response utilizing a collimating mask that deposited on at least one of a surface of the semiconductor substrate and of a thickness so that the collimating mask is suitable as a general purpose collimator, and a cathode electrode substantially covering the surface of the semiconductor substrate;

    collimating the ionizing radiation, wherein said collimating includes aligning a plurality of apertures of a first collimator with a corresponding opening in the collimating mask and the central region, with a gap between said first collimator and the collimating mask, and aligning a plurality of apertures of a stacking collimator with a corresponding aperture in said first collimator; and

    receiving the ionizing radiation at the central region, with the gap between said first collimator and the collimating mask.

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