Apparatus and method for detection with a scanning microscope

• US 7,495,236 B2
• Filed: 09/19/2006
• Issued: 02/24/2009
• Est. Priority Date: 09/21/2005
• Status: Active Grant

• Current Assignee: Leica Microsystems CMS GmbH (Danaher Corporation)
• Original Assignee: Leica Microsystems CMS GmbH (Danaher Corporation)
• Inventors: Widzgowski, Bernd, Birk, Holger
• Primary Examiner(s): Porta; David P
• Assistant Examiner(s): Taningco; Marcus H
• Application Number:
  US11/523,109
• Publication Number:
  US 20070063153A1
• Time in Patent Office: 889 Days
• Field of Search: 250/461.2
• US Class Current: 250/461.2
• CPC Class Codes: G02B 21/0036 Scanning details, e.g. scanning stages
• CPC Class Codes: G02B 21/008 Details of detection or image processing, including general computer control

Abstract

An apparatus and a method for detection with a scanning microscope (1) are disclosed. The scanning microscope (1) encompasses a scanning device (7) that guides an illuminating light beam (3) through a scanning optical system (12) and a microscope optical system (13) and over or through a specimen (15). A digital circuit (30), which periodically interrogates the detected signals within a pixel (P_x,y) and calculates an average therefrom, is placed after the detector unit (19).

Claims

1. A method for detection with a scanning microscope, the scanning microscope comprising a scanning device (7) that guides an illuminating light beam (3) through a scanning optical system (12) and a microscope optical system (13) and over or through a specimen (15), the specimen (15) being illuminated in multiple pixels (P_x,y) with the illuminating light beam (3), and the light emanating from the specimen (15) being received with a detector unit (19), and detected signals being generated, wherein the scanning microscope further comprises a digital circuit comprising a summing element and a dividing element,

the method comprising the following steps:

interrogating a detected signal of the detector unit (19) by means of said digital circuit;

summing the detected signal of the detector unit (19) by means of said summing element resulting in a sum of detected signals;

repeating said steps of interrogating and summing for a number of detected signals, wherein said number of detected signals defines in a cycle;

dividing the sum of detected signals by the number of detected signals by means of said dividing element resulting in an average detected signal;

interrogating a detected signal of the detector unit (19) by means of said digital circuit;

setting said summing element equal to said detected signal of the detector unit (19); and

,

repeating the steps above.

2. The method according to claim 1, wherein a multiplying element is placed before the summing element and dividing element in the digital circuit.

3. The method according to claim 2, wherein an amplification of the detected signals is carried out with the multiplying element, thereby increasing the numerical precision of the summing element and the dividing element.

4. The method according to claim 3, wherein the scanning microscope (1) is a laser scanning microscope.

5. The method according to one of claims 2, wherein the scanning microscope is equipped with an adjusting element for the gain, so that a digital amplification of the digital circuit and an analog amplification of the digital circuit (19) are combined.

6. The method according to claim 5, wherein the scanning microscope (1) is a laser scanning microscope.

7. The method according to claim 2, wherein the scanning microscope (1) is a laser scanning microscope.

8. The method according to one of claims 1, wherein the scanning microscope is equipped with an adjusting element for the gain, so that a digital amplification of the digital circuit and an analog amplification of the digital circuit (19) are combined.

9. The method according to claim 8, wherein the analog amplification of the detector unit (19) is compensated for by corresponding multiplication in the digital circuit.

10. The method according to claim 9, wherein the detector unit (19) possesses a characteristic curve whose dynamics are elevated by means of the amplification in the digital circuit.

11. The method according to claim 10, wherein the scanning microscope (1) is a laser scanning microscope.

12. The method according to claim 9 wherein the scanning microscope (1) is a laser scanning microscope.

13. The method according to claim 8, wherein the scanning microscope (1) is a laser scanning microscope.

14. The method according to one of claims 1, wherein the scanning microscope is equipped with an adjusting element for the gain, so that a digital amplification of the digital circuit and an analog amplification of the digital circuit (19) are combined.

15. The method according to one of claims 3, wherein the scanning microscope is equipped with an adjusting element for the gain, so that a digital amplification of the digital circuit and an analog amplification of the digital circuit (19) are combined.

16. The method according to claim 15, wherein the analog amplification of the detector unit (19) is compensated for by corresponding multiplication in the digital circuit.

17. The method according to claim 16, wherein the detector unit (19) possesses a characteristic curve whose dynamics are elevated by means of the amplification in the digital circuit.

18. The method according to claim 17, wherein the scanning microscope (1) is a laser scanning microscope.

19. The method according to claim 15, wherein the scanning microscope (1) is a laser scanning microscope.

20. The method according to claim 16, wherein the scanning microscope (1) is a laser scanning microscope.

21. The method according to claim 14, wherein the analog amplification of the detector unit (19) is compensated for by corresponding multiplication in the digital circuit.

22. The method according to claim 21, wherein the detector unit (19) possesses a characteristic curve whose dynamics are elevated by means of the amplification in the digital circuit.

23. The method according to claim 22, wherein the scanning microscope (1) is a laser scanning microscope.

24. The method according to claim 21, wherein the scanning microscope (1) is a laser scanning microscope.

25. The method according to claim 14, wherein the scanning microscope (1) is a laser scanning microscope.

26. The method according to claim 5, wherein the analog amplification of the detector unit (19) is compensated for by corresponding multiplication in the digital circuit.

27. The method according to claim 26, wherein the detector unit (19) possesses a characteristic curve whose dynamics are elevated by means of the amplification in the digital circuit.

28. The method according to claim 27, wherein the scanning microscope (1) is a laser scanning microscope.

29. The method according to claim 26, wherein the scanning microscope (1) is a laser scanning microscope.

30. The method according to claim 1, wherein the scanning microscope (1) is a laser scanning microscope.