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Apparatus and method for detection with a scanning microscope

  • US 7,495,236 B2
  • Filed: 09/19/2006
  • Issued: 02/24/2009
  • Est. Priority Date: 09/21/2005
  • Status: Active Grant
First Claim
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1. A method for detection with a scanning microscope, the scanning microscope comprising a scanning device (7) that guides an illuminating light beam (3) through a scanning optical system (12) and a microscope optical system (13) and over or through a specimen (15), the specimen (15) being illuminated in multiple pixels (Px,y) with the illuminating light beam (3), and the light emanating from the specimen (15) being received with a detector unit (19), and detected signals being generated, wherein the scanning microscope further comprises a digital circuit comprising a summing element and a dividing element,the method comprising the following steps:

  • interrogating a detected signal of the detector unit (19) by means of said digital circuit;

    summing the detected signal of the detector unit (19) by means of said summing element resulting in a sum of detected signals;

    repeating said steps of interrogating and summing for a number of detected signals, wherein said number of detected signals defines in a cycle;

    dividing the sum of detected signals by the number of detected signals by means of said dividing element resulting in an average detected signal;

    interrogating a detected signal of the detector unit (19) by means of said digital circuit;

    setting said summing element equal to said detected signal of the detector unit (19); and

    ,repeating the steps above.

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