Semiconductor light-emitting device and manufacturing method therefor
First Claim
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1. A semiconductor light-emitting device comprising:
- a DBR (Distributed Bragg Reflector) and a light-emitting layer supported by at least a substrate comprising GaAs, the DBR being located between the substrate comprising GaAs and the light-emitting layer, wherein light directed from the light-emitting layer toward a top surface of the light-emitting device has a radiation angle dependence;
a semiconductor layer formed over at least the light-emitting layer, a top surface of the semiconductor layer comprising a roughened surface which is not at least partially covered by the other semiconductor layers in order to cause light output from the light-emitting device to be scattered upon leaving the top surface of the device;
wherein no DBR is provided between the light-emitting layer and the semiconductor layer having the top surface that is roughened; and
wherein a top electrode of the device includes a plurality of separate apertures defined therein so as to expose different parts of the roughened surface of the semiconductor layer.
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Abstract
On a GaAs substrate (1), are formed a DBR (Distributed Bragg Reflector) (3), and a light-emitting layer (5) made of a plurality of layers of AlyGazIn1-y-zP (0≦y≦1, 0≦z≦1) above the DBR (3). A semiconductor layer or a plurality of semiconductor layers (6)-(10) having a number of layers of 1 or more are formed on the light-emitting layer (5), and a grating pattern for scattering light is formed on a surface of the semiconductor layer (9) by photolithography and by etching with a sulfuric acid/hydrogen peroxide based etchant. Thus, a semiconductor device small in radiation angle dependence of light emission wavelength, as well as a manufacturing method therefor, are provided.
22 Citations
18 Claims
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1. A semiconductor light-emitting device comprising:
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a DBR (Distributed Bragg Reflector) and a light-emitting layer supported by at least a substrate comprising GaAs, the DBR being located between the substrate comprising GaAs and the light-emitting layer, wherein light directed from the light-emitting layer toward a top surface of the light-emitting device has a radiation angle dependence; a semiconductor layer formed over at least the light-emitting layer, a top surface of the semiconductor layer comprising a roughened surface which is not at least partially covered by the other semiconductor layers in order to cause light output from the light-emitting device to be scattered upon leaving the top surface of the device; wherein no DBR is provided between the light-emitting layer and the semiconductor layer having the top surface that is roughened; and wherein a top electrode of the device includes a plurality of separate apertures defined therein so as to expose different parts of the roughened surface of the semiconductor layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A semiconductor light-emitting device comprising:
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a DBR (Distributed Bragg Reflector) and a light-emitting layer supported by a substrate comprising GaAs, the DBR being located closer to the substrate comprising GaAs than is the light-emitting layer; and a semiconductor layer formed on the light-emitting layer, and wherein at least part of a top surface of the semiconductor layer is roughened so as to define a roughened surface which is not at least partially covered by the other semiconductor layers in order to cause light output from the light-emitting device to be scattered upon leaving the top surface of the device; wherein no DBR is provided between the light-emitting layer and the semiconductor layer having, the top surface that is roughened; and wherein a top electrode of the device includes a plurality of separate apertures defined therein so as to expose different parts of the roughened surface of the semiconductor layer. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18)
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Specification