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Inspection device of a semiconductor device

  • US 7,495,464 B2
  • Filed: 04/12/2006
  • Issued: 02/24/2009
  • Est. Priority Date: 01/23/2006
  • Status: Expired due to Fees
First Claim
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1. An inspection device of a semiconductor device, comprising:

  • a socket where the semiconductor device is installed;

    a measuring part configured to inspect an electrical property of the semiconductor device; and

    a standard sample board where a standard sample is mounted;

    whereinthe standard sample and the socket are provided in a body,a standard value of the standard sample is stored in the measuring part,the standard sample board and the socket are unified,the standard sample board is electrically connected to the measuring part,the standard sample board includes a relay circuit configured to electrically connect or disconnect the measuring part and the standard sample, andwhether there is abnormality of the measuring part is determined by comparing a value of the standard sample measured by the measuring part and the standard value.

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