Inspection device of a semiconductor device
First Claim
Patent Images
1. An inspection device of a semiconductor device, comprising:
- a socket where the semiconductor device is installed;
a measuring part configured to inspect an electrical property of the semiconductor device; and
a standard sample board where a standard sample is mounted;
whereinthe standard sample and the socket are provided in a body,a standard value of the standard sample is stored in the measuring part,the standard sample board and the socket are unified,the standard sample board is electrically connected to the measuring part,the standard sample board includes a relay circuit configured to electrically connect or disconnect the measuring part and the standard sample, andwhether there is abnormality of the measuring part is determined by comparing a value of the standard sample measured by the measuring part and the standard value.
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Abstract
An inspection device of a semiconductor device includes a socket where the semiconductor device is installed, and a measuring part configured to inspect an electrical property of the semiconductor device. A standard sample and the socket are provided in a body. A standard value of the standard sample is stored in the measuring part. Whether there is abnormality of the measuring part is determined by comparing a value of the standard sample measured by the measuring part and the standard value.
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Citations
9 Claims
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1. An inspection device of a semiconductor device, comprising:
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a socket where the semiconductor device is installed; a measuring part configured to inspect an electrical property of the semiconductor device; and a standard sample board where a standard sample is mounted; wherein the standard sample and the socket are provided in a body, a standard value of the standard sample is stored in the measuring part, the standard sample board and the socket are unified, the standard sample board is electrically connected to the measuring part, the standard sample board includes a relay circuit configured to electrically connect or disconnect the measuring part and the standard sample, and whether there is abnormality of the measuring part is determined by comparing a value of the standard sample measured by the measuring part and the standard value. - View Dependent Claims (2, 3, 4, 5)
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6. An inspection device of a semiconductor device, comprising:
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a socket where the semiconductor device is installed; a measuring part configured to inspect an electrical property of the semiconductor device; and a standard sample board where a standard sample is mounted; wherein the standard sample and the socket are provided in a body, a standard value of the standard sample is stored in the measuring part, the standard sample board and the socket are unified, whether there is abnormality of the measuring part is determined by comparing a value of the standard sample measured by the measuring part and the standard value, and a relay board, the relay board being configured to electrically connect the semiconductor device and the standard sample, is provided between the socket where the semiconductor device is provided and the standard sample board. - View Dependent Claims (7, 8, 9)
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Specification