Curved slit valve door with flexible coupling

• US 7,497,414 B2
• Filed: 01/06/2006
• Issued: 03/03/2009
• Est. Priority Date: 06/14/2004
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Berkstresser, David, Lee, Jae-Chull
• Primary Examiner(s): Fristoe, Jr.; John K
• Application Number:
  US11/326,759
• Publication Number:
  US 20060151735A1
• Time in Patent Office: 1,152 Days
• Field of Search: 251/177, 251/301, 251/303, 251/334, 251/176, 251/192, 251/193, 251/333, 49/40, 49/41, 492/21
• US Class Current: 251/303
• CPC Class Codes: F16K 1/2007 specially adapted operating means therefor operating means per se F16K31/00
• CPC Class Codes: F16K 1/2021 with a plurality of valve members
• CPC Class Codes: F16K 1/2028 Details of bearings for the axis of rotation
• CPC Class Codes: F16K 1/205 the sealing being arranged on the valve member
• CPC Class Codes: F16K 1/2078 Sealing means for the axis of rotation
• CPC Class Codes: F16K 1/24 with valve members that, on opening of the valve, are initially lifted from the seat and next are turned around an axis parallel to the seat
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations
• CPC Class Codes: H01L 21/67126 Apparatus for sealing, encapsulating, glassing, decapsulating or the like processes H01L23/02, H01L23/28
• CPC Class Codes: H01L 21/67201 characterized by the construction of the load-lock chamber

Abstract

Embodiments of an apparatus for sealing a substrate transfer passage in a chamber are provided. In one embodiment, an apparatus for sealing a substrate transfer passage in a chamber includes an elongated door member having a concave sealing face coupled to an actuator by a flexible coupling. The flexible coupling configured to allow movement of the door member relative to the lever arm in at least two planes.

Claims

1. A chamber, comprising:

a chamber body having a substrate transfer port;

a door member having a curved sealing face positionable to selectively seal the substrate transfer port;

a lever arm; and

a flexible coupling connecting the lever arm to the door member, the flexible coupling configured to allow lateral movement of the door member relative the lever arm, wherein the flexible coupling further comprises;

a first resilient bushing; and

a linking member passing through the first bushing, the door member, and the lever arm.

2. The chamber of claim 1, wherein the flexible coupling further comprises:

a second resilient bushing having the linking member disposed therethrough, wherein the first and second resilient bushings are separated by the lever arm.

3. The chamber of claim 2, wherein the flexible coupling further comprises:

a third resilient bushing having the linking member disposed therethrough and positioned adjacent the second resilient bushing.

4. The chamber of claim 3, wherein the second resilient bushing and the third resilient bushing are separated by a spacer.

5. The chamber of claim 1, wherein the chamber body further comprises a plurality of stacked single substrate transfer chambers.

6. A chamber, comprising:

a chamber body having a substrate transfer port;

a door member having a curved sealing face positionable to selectively seal the substrate transfer port;

a lever arm; and

a flexible coupling connecting the lever arm to the door member, the flexible coupling configured to allow lateral movement of the door member relative the lever arm, wherein the flexible coupling further comprises;

a bolt passing through a first hole formed through an end portion of the door member and a second hole formed through the lever arm;

a first resilient bushing disposed around the bolt and separated by the door member from the lever arm; and

a second resilient bushing disposed around the bolt and separated by the lever arm from the door member.

7. The chamber of claim 6 further comprising:

a spacer disposed between the lever arm and the door member.

8. The chamber of claim 6, wherein the lever arm comprises:

a recess formed therein, the second resilient bushing disposed in the recess.

9. The chamber of claim 6, wherein the chamber body further comprises a plurality of stacked single substrate transfer chambers.