Apparatus for determining a temperature of a substrate and methods therefor

• US 7,497,614 B2
• Filed: 07/27/2007
• Issued: 03/03/2009
• Est. Priority Date: 09/22/2005
• Status: Expired due to Fees

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Benjamin, Neil Martin Paul, Gaff, Keith
• Primary Examiner(s): Verbitsky; Gail
• Assistant Examiner(s): Jagan; Mirellys
• Application Number:
  US11/829,833
• Publication Number:
  US 20080019418A1
• Time in Patent Office: 585 Days
• Field of Search: 374/141, 374/161, 374/120
• US Class Current: 374/161
• CPC Class Codes: G01K 11/20 using thermoluminescent materials G01K11/32 takes precedence
• CPC Class Codes: G01K 11/3213 using changes in luminescence, e.g. at the distal end of the fibres

Abstract

An apparatus for measuring a temperature of a substrate is disclosed. The apparatus includes a phosphor material in direct contact with the substrate and in thermal contact with the substrate, the phosphor material producing a fluorescent response in a first wavelength range when exposed to a electromagnetic radiation in a second wavelength range, the fluorescent response decaying at a decay rate that is related to a temperature of the phosphor material, and the phosphor material producing a first set of non volatile byproducts when expose to a plasma.

Claims

1. In a plasma processing system, an apparatus for measuring a temperature of a substrate, the apparatus comprising:

a phosphor material in direct contact with said substrate and in thermal contact with said substrate, said phosphor material producing a fluorescent response in a first wavelength range when exposed to a electromagnetic radiation in a second wavelength range, said fluorescent response decaying at a decay rate that is related to a temperature of said phosphor material;

a barrier window positioned between said phosphor material and a plasma, wherein said barrier window allows at least a portion of said first wavelength and said second wavelength to be transmitted; and

a gasket configured to surround said phosphor material,

wherein said phosphor material, said barrier window, and said gasket are disposed inside a notch, said notch disposed on a surface of said substrate.

2. The apparatus of claim 1, wherein said barrier window is removable for replacing said phosphor material.

3. The apparatus of claim 1, wherein said gasket is further configured to surround at least a portion of said barrier window.

4. The apparatus of claim 1, wherein a sensor/transmitter transmits a second wavelength in said second wavelength range, and said sensor/transmitter measures a first wavelength in said first wavelength range.

5. The apparatus of claim 1, wherein said barrier window is configured to secure said phosphor material in a two-tiered notch on a surface of said substrate and to shield said phosphor material from said plasma.

6. The apparatus of claim 1, wherein a sensor/transmitter is positioned in a chuck that supports said substrate.

7. The apparatus of claim 1, wherein said barrier window is secured to said substrate with one of an adhesive, a friction fit, a pressure fit, and a gasket.

8. The apparatus of claim 1 further comprising a second phosphor material, said second phosphor material positioned in said notch, said phosphor material configured for measuring a first temperature range, said second phosphor material configured for measuring a second temperature range.

9. In a plasma processing system, an apparatus of measuring a temperature of a substrate, the apparatus comprising:

a phosphor material configured for producing a fluorescent response in a first wavelength range when exposed to a electromagnetic radiation in a second wavelength range, said fluorescent response decaying at a decay rate that is related to a temperature of said phosphor material;

a barrier window positioned between said phosphor material and a plasma, wherein said barrier window allows at least a portion of said first wavelength and said second wavelength to be transmitted;

means of determining said temperature from said decay rate of said fluorescent response when said electromagnetic radiation is transmitted to said phosphor material through said barrier window; and

a gasket configured to surround said phosphor material,

wherein said phosphor material, said barrier window, and said gasket are disposed inside a notch, said notch disposed on a surface of said substrate.

10. The apparatus of claim 9, wherein said barrier window is removable for replacing said phosphor material.

11. The apparatus of claim 9, wherein said gasket is further configured to surround at least a portion of said barrier window.

12. The apparatus of claim 9, wherein a sensor/transmitter transmits a second wavelength in said second wavelength range, and said sensor/transmitter measures a first wavelength in said first wavelength range.

13. The apparatus of claim 9, wherein said barrier window is configured to secure said phosphor material in a two-tiered notch on a surface of said substrate and to shield said phosphor material from said plasma.

14. The apparatus of claim 9, wherein a sensor/transmitter is positioned in a chuck that supports said substrate.

15. The apparatus of claim 9, wherein said barrier window is secured to said substrate with one of an adhesive, a friction fit, a pressure fit, and a gasket.

16. The apparatus of claim 9 further comprising a second phosphor material, said second phosphor material positioned in said notch, said phosphor material configured for measuring a first temperature range, said second phosphor material configured for measuring a second temperature range.

17. In a plasma processing system, a method for measuring a temperature of a substrate, comprising:

thermally coupling a phosphor material to said substrate, said phosphor material producing a fluorescent response in a first wavelength range when exposed to a electromagnetic radiation in a second wavelength range, said fluorescent response decaying at a decay rate that is related to a temperature of said phosphor material;

providing a gasket, said gasket configured to surround said phosphor material;

positioning a barrier window between said phosphor material and a plasma, wherein said barrier window allows at least a portion of said first wavelength and said second wavelength to be transmitted;

disposing said phosphor material, said gasket, and barrier in a notch, said notch disposed on a surface of said substrate; and

determining said temperature from said decay rate of said fluorescent response when said electromagnetic radiation is transmitted to said phosphor material through said barrier window.

18. The method of claim 17, wherein said barrier window is removable for replacing said phosphor material.

19. The method of claim 17, wherein said gasket is further configured to surround at least a portion of said barrier window.

20. The method of claim 17, wherein a sensor/transmitter transmits a second wavelength in said second wavelength range, and said sensor/transmitter measures a first wavelength in said first wavelength range.

21. The method of claim 17, wherein said barrier window is configured to secure said phosphor material in a two-tiered notch on a surface of said substrate and to shield said phosphor material from said plasma.

22. The method of claim 17, wherein a sensor/transmitter is positioned in a chuck that supports said substrate.

23. The method of claim 17, wherein said barrier window is secured to said substrate with one of an adhesive, a friction fit, a pressure fit, and a gasket.

24. The method of claim 17 further comprising providing a second phosphor material, said second phosphor material in said notch, said phosphor material configured for measuring a first temperature range, said second phosphor material configured for measuring a second temperature range.

25. The method of claim 17, wherein said barrier window comprises an anti-reflection coating.