Vibration damping during chemical mechanical polishing
First Claim
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1. A carrier head for chemical mechanical polishing, comprising:
- a backing assembly including a substrate support surface;
a housing connectable to a drive shaft to rotate with the drive shaft about a rotation axis;
a damping material in a load path between the backing assembly and the housing to reduce transmission of vibrations from the backing assembly to the housing; and
a gimbal mechanism between the backing assembly and the housing that permits at least a portion of the backing assembly to gimbal relative to the housing, where the gimbal mechanism includes;
a substantially planar flexure ring that flexes in a direction perpendicular to the plane of the flexure ring to gimbal at least a portion of the backing assembly relative to the housing; and
the damping material is mounted to the flexure ring.
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Abstract
A carrier head for chemical mechanical polishing is described. The carrier head includes a backing assembly, a housing and a damping material. The backing assembly includes a substrate support surface. The housing is connectable to a drive shaft to rotate with the drive shaft about a rotation axis. In one implementation, the damping material is in a load path between the backing assembly and the housing to reduce transmission of vibrations from the backing assembly to the housing.
97 Citations
3 Claims
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1. A carrier head for chemical mechanical polishing, comprising:
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a backing assembly including a substrate support surface; a housing connectable to a drive shaft to rotate with the drive shaft about a rotation axis; a damping material in a load path between the backing assembly and the housing to reduce transmission of vibrations from the backing assembly to the housing; and a gimbal mechanism between the backing assembly and the housing that permits at least a portion of the backing assembly to gimbal relative to the housing, where the gimbal mechanism includes; a substantially planar flexure ring that flexes in a direction perpendicular to the plane of the flexure ring to gimbal at least a portion of the backing assembly relative to the housing; and the damping material is mounted to the flexure ring. - View Dependent Claims (2, 3)
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Specification