Multi-layer three-dimensional structures having features smaller than a minimum feature size associated with the formation of individual layers
First Claim
1. A layered three-dimensional structure formed from a process having a minimum feature size associated with the formation of features on each layer, the layered three-dimensional structure comprising:
- a first layer defining a first opening, wherein the first opening is at least as large as the minimum feature size; and
a second layer positioned adjacent to the first layer, wherein the second layer defines a second opening at least as large as the minimum feature size, wherein the second opening is positioned adjacent the first opening to define a third opening at the junction of the first opening and the second opening, and wherein the third opening has an effective size that is at least in part less than the minimum feature size, andwherein portions of the second layer overlying portions of the first layer are adhered to one another and wherein at least a portion of the second opening overlies at least a portion of the first opening,wherein the first layer comprises a first portion and a first movable portion positioned on the opposite side of the first opening from the first fixed portion, wherein the second layer comprises a second fixed portion and a second movable portion positioned on the opposite side of the second opening from the second fixed portion, wherein the second fixed portion is adhered to the first fixed portion to form a fixed element, wherein the second movable portion is adhered to the second movable portion to form a movable element, and wherein the movable element is capable of moving relative to the fixed element.
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Accused Products
Abstract
Embodiments of multi-layer three-dimensional structures and formation methods provide structures with effective feature (e.g. opening) sizes (e.g. virtual gaps) that are smaller than a minimum feature size (MFS) that exists on each layer as a result of the formation method used in forming the structures. In some embodiments, multi-layer structures include a first element (e.g. first patterned layer with a gap) and a second element (e.g. second patterned layer with a gap) positioned adjacent the first element to define a third element (e.g. a net gap or opening resulting from the combined gaps of the first and second elements) where the first and second elements have features that are sized at least as large as the minimum feature size and the third element, at least in part, has dimensions or defines dimensions smaller than the minimum feature size.
42 Citations
11 Claims
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1. A layered three-dimensional structure formed from a process having a minimum feature size associated with the formation of features on each layer, the layered three-dimensional structure comprising:
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a first layer defining a first opening, wherein the first opening is at least as large as the minimum feature size; and a second layer positioned adjacent to the first layer, wherein the second layer defines a second opening at least as large as the minimum feature size, wherein the second opening is positioned adjacent the first opening to define a third opening at the junction of the first opening and the second opening, and wherein the third opening has an effective size that is at least in part less than the minimum feature size, and wherein portions of the second layer overlying portions of the first layer are adhered to one another and wherein at least a portion of the second opening overlies at least a portion of the first opening, wherein the first layer comprises a first portion and a first movable portion positioned on the opposite side of the first opening from the first fixed portion, wherein the second layer comprises a second fixed portion and a second movable portion positioned on the opposite side of the second opening from the second fixed portion, wherein the second fixed portion is adhered to the first fixed portion to form a fixed element, wherein the second movable portion is adhered to the second movable portion to form a movable element, and wherein the movable element is capable of moving relative to the fixed element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification