Shielded probe for testing a device under test
First Claim
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1. A probe comprising:
- (a) a dielectric substrate having a major surface;
(b) an elongate conductor suitable to be electrically interconnected to a test signal supported by a first side of said substrate;
(c) a conductive member suitable to be electrically interconnected to a ground signal supported by said second side of said substrate wherein said conductive member together with said elongate conductor form a controlled impedance transmission structure;
(d) a conductive path between said first side of said substrate and said second side of said substrate in a manner free from an air gap between the conductive path and an edge of said substrate for at least a majority of the thickness of said substrate and said conductive path free from electrical interconnection with said conductive member; and
(e) a contact electrically interconnected to said conductive path for testing a device under test.
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Abstract
A probe for measuring the electrical characteristics of integrated circuits or other microelectronic devices at high frequencies may include a dielectric substrate that supports a signal path interconnecting test instrumentation and a probe tip and a ground path that shields both the signal path and the probe tip.
1108 Citations
47 Claims
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1. A probe comprising:
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(a) a dielectric substrate having a major surface; (b) an elongate conductor suitable to be electrically interconnected to a test signal supported by a first side of said substrate; (c) a conductive member suitable to be electrically interconnected to a ground signal supported by said second side of said substrate wherein said conductive member together with said elongate conductor form a controlled impedance transmission structure; (d) a conductive path between said first side of said substrate and said second side of said substrate in a manner free from an air gap between the conductive path and an edge of said substrate for at least a majority of the thickness of said substrate and said conductive path free from electrical interconnection with said conductive member; and (e) a contact electrically interconnected to said conductive path for testing a device under test. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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30. A probe comprising:
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(a) a dielectric substrate supporting an elongate conductor on a first side of said substrate and a conductive member supported by said second side of said substrate wherein said conductive member together with said elongate conductor form a controlled impedance transmission structure; (b) a conductive path between said first side of said substrate and said second side of said substrate in a region within the periphery of said substrate for at least a majority of the thickness of said substrate; and (c) a contact electrically interconnected to said conductive path for testing a device under test. - View Dependent Claims (31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47)
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Specification