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Multiaxial sensor

  • US 7,500,406 B2
  • Filed: 06/21/2004
  • Issued: 03/10/2009
  • Est. Priority Date: 09/30/2003
  • Status: Expired due to Fees
First Claim
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1. A multiaxial sensor having a plurality of multiaxial sensor units for measuring one or more of two or more-axial force, moment, acceleration, and angular acceleration, externally applied, the plurality of multiaxial sensor units being disposed on a same plane and disposed around a center point of the multiaxial sensor at 90 degree intervals at the same distance from the center point, each of the multiaxial sensor units comprising:

  • eight strain gauges disposed on a single plane;

    one bridge circuit constructed by connecting the strain gauges; and

    a strain generation body comprising a force receiving portion provided at a center, a fixed portion provided on an outer circumference, and an annular diaphragm portion connecting the force receiving portion and the fixed portion to each other;

    wherein the strain gauges being disposed at four positions on outer and inner edges of the diaphragm on a line perpendicular to a center line of the diaphragm, and at four positions on the outer and inner edges of the diaphragm on a line perpendicular to the line perpendicular to the center line of the diaphragm; and

    each of the strain gauges is a piezoresistive element or a strain gauge formed by sputtering.

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