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Micro-electro-mechanical system (MEMS) and apparatus for generating power responsive to mechanical vibration

  • US 7,501,726 B1
  • Filed: 07/28/2004
  • Issued: 03/10/2009
  • Est. Priority Date: 07/28/2004
  • Status: Expired due to Fees
First Claim
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1. An energy harvesting apparatus comprising:

  • a substrate having a plurality of integral compliant regions;

    at least two ferromagnetic masses each coupled to a corresponding one or more of the integral compliant regions such that at least one of the ferromagnetic masses moves with respect to the substrate responsive to substrate acceleration, each ferromagnetic mass having an inner magnetic pole disposed such that the inner magnetic poles are separated from one another by a flux gap, wherein the magnetic polarity of each inner magnetic pole is similar to the magnetic polarity of the inner magnetic pole on the opposing side of the flux gap;

    a coil coupled to the substrate and disposed within the flux gap where it is exposed to a changing magnetic flux arising from motion of at least one of the ferromagnetic masses with respect to the substrate; and

    conductors coupled to the coil for conducting electrical current flowing in response to the changing magnetic flux.

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