Shielded probe for testing a device under test
First Claim
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1. A probe comprising:
- (a) at least one selected from a flexible or a semi-flexible substrate;
(b) an elongate conductor suitable to be electrically interconnected to a test signal supported by said substrate;
(c) a conductive member suitable to be electrically interconnected to a ground signal supported by said substrate wherein said conductive member and said elongate conductor form a controlled impedance structure;
(d) a conductive path between said first side of said substrate and said second side of said substrate in a manner free from an air gap between the conductive path and an edge of said substrate for at least a majority of the thickness of said substrate and said conductive path electrically connected to said elongate conductor and free from electrical interconnection with said conductive member; and
(e) a contact electrically interconnected to said conductive path for testing a device under test.
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Abstract
A probe for measuring the electrical characteristics of integrated circuits or other microelectronic devices at high frequencies may include a dielectric substrate that supports a signal path interconnecting test instrumentation and a probe tip and a ground path that shields both the signal path and the probe tip.
1105 Citations
53 Claims
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1. A probe comprising:
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(a) at least one selected from a flexible or a semi-flexible substrate; (b) an elongate conductor suitable to be electrically interconnected to a test signal supported by said substrate; (c) a conductive member suitable to be electrically interconnected to a ground signal supported by said substrate wherein said conductive member and said elongate conductor form a controlled impedance structure; (d) a conductive path between said first side of said substrate and said second side of said substrate in a manner free from an air gap between the conductive path and an edge of said substrate for at least a majority of the thickness of said substrate and said conductive path electrically connected to said elongate conductor and free from electrical interconnection with said conductive member; and (e) a contact electrically interconnected to said conductive path for testing a device under test. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37)
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38. A probe comprising:
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(a) a non-rigid substrate supporting an elongate conductor on a first side of said substrate and a conductive member supported by a second side of said substrate wherein said conductive member and said elongate conductor form a controlled impedance structure; (b) a conductive path between said first side of said substrate and said second side of said substrate in a region within the periphery of said substrate for at least a majority of the thickness of said substrate and said conductive path electrically connected to said elongate conductor and free from electrical interconnection with said conductive member; and (c) a contact electrically interconnected to said conductive path for testing a device under test. - View Dependent Claims (39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53)
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Specification