Method and structure for high fill factor spatial light modulator with integrated spacer layer

• US 7,502,158 B2
• Filed: 10/13/2005
• Issued: 03/10/2009
• Est. Priority Date: 10/13/2005
• Status: Active Grant

• Current Assignee: Miradia Inc. (Walsin Lihwa Corporation)
• Original Assignee: Miradia Inc. (Walsin Lihwa Corporation)
• Inventors: Yang, Xiao
• Primary Examiner(s): Choi; William C
• Application Number:
  US11/250,297
• Publication Number:
  US 20070091413A1
• Time in Patent Office: 1,244 Days
• Field of Search: 359/214, 359223-225, 359290-292, 359/295, 359/298
• US Class Current: 359/290
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

A high fill factor spatial light modulator. The spatial light modulator includes a device layer coupled to a support base. The device layer includes a mirror plate and a coplanar flexible member. The spatial light modulator also includes a patterned spacer layer coupled to the mirror plate. In some embodiments, the spacer layer is fabricated from an aluminum layer. The method further includes a reflective layer coupled to the spacer layer.

Claims

1. A high fill factor spatial light modulator, the spatial light modulator comprising:

a device layer coupled to a support base, wherein the device layer comprises a mirror plate and a coplanar flexible member, the mirror plate having a first dimension characterized by a distance between diagonal corners of the mirror plate;

a patterned spacer layer coupled to the mirror plate, the patterned spacer layer comprising a plurality of longitudinal ribs; and

a reflective layer coupled to the spacer layer, the reflective layer being continuous over a second dimension equal to the first dimension.

2. The spatial light modulator of claim 1 further comprising an adhesion layer disposed between the mirror plate and the patterned spacer layer, wherein the patterned spacer layer is fabricated from a layer of aluminum and the adhesion layer is a layer of titanium.

3. The spatial light modulator of claim 1 wherein the flexible member is a torsion spring hinge.

4. The spatial light modulator of claim 3 wherein the mirror plate and the torsion spring hinge are fabricated from a single silicon substrate.

5. The spatial light modulator of claim 1 wherein the mirror plate and the flexible member are characterized by an equal thickness measured normal to the reflective layer.

6. The spatial light modulator of claim 1 further comprising an adhesion layer disposed between the mirror plate and the patterned spacer layer.

7. The spatial light modulator of claim 6 wherein the patterned spacer layer is fabricated from a layer of aluminum and the adhesion layer is a layer of titanium.

8. A high fill factor spatial light modulator comprising:

a device layer coupled to a support base, wherein the device layer comprises a mirror plate and a coplanar flexible member, the mirror plate having a first dimension characterized by a distance between diagonal corners of the mirror plate;

a patterned spacer layer coupled to the mirror plate, the patterned spacer layer comprising a plurality of longitudinal ribs; and

a reflective layer coupled to the spacer layer, such that the reflective layer overlies and is spaced apart from the co-planar flexible member, thereby allowing movement of the reflective layer relative to the flexible member, the reflective layer being continuous over a second dimension equal to the first dimension.

9. The spatial light modulator of claim 8 further comprising an adhesion layer disposed between the mirror plate and the patterned spacer layer.

10. The spatial light modulator of claim 9 wherein the patterned spacer layer is fabricated from a layer of aluminum and the adhesion layer is a layer of titanium.

11. The spatial light modulator of claim 8 wherein the flexible member is a torsion spring hinge.

12. The spatial light modulator of claim 11 wherein the mirror plate and the torsion spring hinge are fabricated from a single silicon substrate.

13. The spatial light modulator of claim 8 wherein the mirror plate and the flexible member are characterized by an equal thickness measured normal to the reflective layer.