Automatic testing equipment instrument card and probe cabling system and apparatus

• US 7,504,822 B2
• Filed: 10/28/2005
• Issued: 03/17/2009
• Est. Priority Date: 10/28/2005
• Status: Active Grant

• Current Assignee: Teraydne Incorporated
• Original Assignee: Teradyne Incorporated
• Inventors: Behziz, Arash, Parrish, Frank B.
• Primary Examiner(s): Karlsen; Ernest F
• Application Number:
  US11/262,001
• Publication Number:
  US 20070096756A1
• Time in Patent Office: 1,236 Days
• Field of Search: 324754-765, 324/158.1
• US Class Current: 324/756.03
• CPC Class Codes: G01R 1/07378 using an intermediate adapter, e.g. space transformers G01R1/07371 takes precedence
• CPC Class Codes: G01R 31/2889 Interfaces, e.g. between probe and tester G01R31/31905 and G01R1/07364 take precedence

Abstract

A device for interfacing a test head and a prober is disclosed using wires or cables to provide the connection from a probe card interface boards to the probe card. The use of wires or cables, in place of the traditional pogo pin arrangement allows for more reliable and efficient testing, as well as additional high performance tests to be run. Optionally, a probe interface contains a stiffening member with multiple sidewalks and individual, configuration-specific probe card interface strips are connected to a probe card through zero insertion force clamps. The probe card interface attaches to the test head using standard probe interface board (“PIB”) docking mechanics. The assembly is then connected to a probe to carry out the testing procedures.

Claims

1. A probe interface comprising:

a stiffening member;

a plurality of probe card interface strips, each of the strips having at least one electrical component and affixed to the stiffening member;

a probe card having at least one electrical connector;

a plurality of zero-insertion force clamps, each of the zero-insertion force clamps in electrical communication with at least one of the probe card interface strips, and engaging the at least one electrical connector of the probe card; and

at least one cable, electrically coupling at least one zero-insertion force clamp of the plurality of zero-insertion force clamps and at least one probe card interface strip.

2. The probe interface of claim 1, further comprising a frame affixed to the stiffening member, the frame defining at least one slot, the at least one zero-insertion force clamp disposed in the at least one slot of the frame.

3. The probe interface of claim 2, wherein the at least one slot comprises a ring of radial slots and the at least one electrical connector is disposed on the probe card radially.

4. The probe interface of claim 1, wherein the cable comprises a coaxial cable.

5. The probe interface of claim 1, wherein the cable comprises a polyamide cable.

6. The probe interface of claim 1, wherein the plurality of probe card interface strips are affixed to a backbone of the stiffening member.

7. The probe interface of claim 1, wherein the electrical component is an integrated circuit.

8. The probe interface of claim 1, wherein the electrical component is a trace.

9. The probe interface of claim 1, wherein each of the probe card interface strips further comprises a plurality of signal pads.

10. The probe interface of claim 1, wherein each probe card interface strip has a one-to-one correspondence with a zero-insertion force clamp.