Thermal optical chuck
First Claim
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1. A thermal optical chuck for supporting a device under test in a probe station, said thermal optical chuck comprising:
- (a) a rectangular transparent conductor having a resistance and arranged proximate a surface of said device under test;
(b) a first bus bar in conductive contact with said rectangular transparent conductor at a location nearer a first edge of said conductor than a second edge of said conductor, said first bus bar being connectible to a source of electric current; and
(c) a second bus bar in conductive contact with said transparent conductor at a location nearer said second edge of said conductor than said first edge, said second bus bar being connectible to said source of electric current and spaced apart from said first bus bar.
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Abstract
An accessible optical path to a lower surface of a heatable device under test is provided by a thermal optical chuck comprising a transparent resistor deposited on transparent plate arranged to supporting the device in a probe station.
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Citations
21 Claims
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1. A thermal optical chuck for supporting a device under test in a probe station, said thermal optical chuck comprising:
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(a) a rectangular transparent conductor having a resistance and arranged proximate a surface of said device under test; (b) a first bus bar in conductive contact with said rectangular transparent conductor at a location nearer a first edge of said conductor than a second edge of said conductor, said first bus bar being connectible to a source of electric current; and (c) a second bus bar in conductive contact with said transparent conductor at a location nearer said second edge of said conductor than said first edge, said second bus bar being connectible to said source of electric current and spaced apart from said first bus bar. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A thermal optical chuck for supporting a device under test in a probe station, said thermal optical chuck comprising:
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(a) a base; (b) a transparent plate having a first surface for supporting said device under test and an opposing second surface; (c) a support spacing apart said base and said transparent plate; (d) a transparent conductor having a resistance, said transparent conductor being deposited over a rectangular area of said second surface of said transparent plate, said rectangular area being defined by a first edge and a spaced apart second edge; (e) a first bus bar in conductive contact with said transparent conductor proximate said first edge, said first bus bar being connectible to a source of electric current; and (f) a second bus bar in conductive contact with said transparent conductor proximate said second edge, said second bus bar being connectible to said source of electric current. - View Dependent Claims (19, 20, 21)
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Specification